From Mass Spectrometers
The Benchtop mass spectrometer is a versatile gas analysis system designed to sample gases over a wide range of pressures, from high vacuum up to and beyond atmospheric pressure. A compact system with a range of options, the Benchtop can be designed to suit specific applications. The analyzer and inlet system can be removed from the frame and located remotely from the pumping station.
It uses a Dymaxion mass spectrometer with choice of ion source, capillary inlet manifold, compound turbomolecular pump, dry or oil vane roughing pump, pump controller, and an optional laptop computer to run the System 2000 software platform.
Flexible enough to suit a wide range of customer applications for gas analysis, the Benchtop gas analyzer system is ideal for the semiconductor industry, and is also used in the research and aerospace markets.
EXTENSIVE SOFTWARE FEATURES
Powerful software support includes system integration capability with Visual Basic Scripting and automation for dynamic data exchange (DDE) and object linking and embedding (OLE). Scripting capabilities allow automation of equipment and process monitoring. A simulation mode facilitates user training and application development.
EASY TO USE
An intuitive keypad-and-display interface allows simple access to operating variables. Software-based auto-tune capabilities ensure high-quality, repeatable data, while spectral interpretation suggests the gas species that could be contributing to your spectra.
SYSTEM 2000 OPERATION
Real-time process control with our System 2000 software. On-board analog and digital I/O options provide monitoring and control of other sensor outputs.
The Benchtop gas analyzer is the mass spectrometry system for sampling gases over a wide range of pressures – Find out more.Features
- Covers a wide range of sample pressures
- A complete mass spectrometry system
- Designed to meet specific application needs
- Choice of ion sources
- Mass Range: 1-100, 1-200, 1-300 AMU
- Operating Pressure Range: 10-4 Torr to ultrahigh vacuum
- Minimum Detectable Partial Pressure: 5 x 10-12 Torr ( 5 x 10-14 Torr for electron multiplier units )
- Resolution: Adjustable to constant peak width (0.5 AMU at 10% height)
- Emission Current: 0.1 to 10 mA; 50 mA to degas
- Electron Energy: 30 to 150 volts to operate; 200 volts to degas
- Ion Energy: 1 to 10 volts
- Source Sensitivity (Faraday Cup): 2 x 10-4 Amps per Torr at detector (measured with nitrogen at mass 28) with peak width = 0.5 at 10% height and 1 x 10-3 Amps emission current
- Power Requirements: 24 VDC @ 3 Amps; 110/220 VAC, 50/60 Hz adaptor available
- Mass Stability: ± 0.1 AMU after 30 minute warm-up
- Peak Height: ± 2% after 30 minute warm-up
- Minimum PC Requirements: Windows 98 through Windows 8
- RS-232 Serial Communications
- Interface: Isolated; baud rate selection of 1200 to 38,400; 9-pin, female D-connectors
- RS-485 Addressable Communications Interface: Isolated, baud rate selection of 1200 to 38,400; programmable addresses; 2-pin, female D-connectors
- Optional Analog/Digital I/O Board: Includes two analog inputs, two analog outputs, six relay contact closures, and four digital inputs
- Physical Dimensions:
- 4.6 lb (2.1 kg) without head
- 74. lb (3.4 kg) with head
- Width: 4.5 in. (11.4 cm)
- Length: 9.0 in. (22.9 cm)
- Height: 5.25 in. (13.3 cm)