AMETEK Process Instruments

- Model RGA - Smart Sensor Residual Gas Analyzer



This “zero footprint” Smart Sensor Residual Gas Analyzer has the data acquisition and control electronics mounted directly on the sensor, and can be linked to a computer via either its RS-232 port, or RS-485 port for multiple analyzer instruments.

  • Enclosed ion source for CVD and atmospheric sampling applications
  • Conductance limited ion source for PVD applications
  • Open ion source for UHV applications

  • 100, 200, 300 AMU ranges
  • Optional on-board analog and digital I/O
  • Zero drift electrometer amplifier technology
  • On-board diagnostics
  • RS-232 and RS-485 communications ports

The open ion source is the simplest design and least costly of the ionizer types. It can be inserted directly into the vacuum chamber at pressures of 10-4 Torr. This places the ionizer directly in the sample gas, and because there is no loss in conductance of the sample through the ionizer, the inherent sensitivity is increased. The open ion source RGA offers increased sensitivity at pressures below 10-4 Torr down to ultra high vacuum with PPM level detectability.

  • Mass Range: 1-100, 1-200, 1-300 AMU
  • Operating Pressure Range: Ultrahigh vacuum to atmosphere
  • Minimum Detectable Partial Pressure: 5 x 10-12 Torr ( 5 x 10-14 Torr for electron multiplier units )
  • Resolution: Adjustable to constant peak width (0.5 AMU at 10% height)
  • Emission Current: 0.1 to 10 mA; 50 mA to degas
  • Electron Energy: 30 to 150 volts to operate; 200 volts to degas
  • Ion Energy: 1 to 10 volts
  • Source Sensitivity (Faraday Cup): 2 x 10-4 Amps per Torr at detector (measured with nitrogen at mass 28) with peak width = 0.5 at 10% height and 1 x 10-3 Amps emission current
  • Power Requirements: 24 VDC @ 3 Amps; 110/220 VAC, 50/60 Hz adaptor available


  • Mass Stability: ± 0.1 AMU after 30 minute warm-up
  • Peak Height: ± 2% after 30 minute warm-up
  • Minimum PC Requirements: Windows 98 through Windows 8
  • RS-232 Serial Communications
  • Interface: Isolated; baud rate selection of 1200 to 38,400; 9-pin, female D-connectors
  • RS-485 Addressable Communications Interface: Isolated, baud rate selection of 1200 to 38,400; programmable addresses; 2-pin, female D-connectors
  • Optional Analog/Digital I/O Board: Includes two analog inputs, two analog outputs, six relay contact closures, and four digital inputs

Physical Dimensions

  • Weight: 4.6 lb (2.1 kg) without head
  • 74. lb (3.4 kg) with head
  • Width: 4.5 in. (11.4 cm)
  • Length: 9.0 in. (22.9 cm)
  • Height: 5.25 in. (13.3 cm)

Additional features of the Open Ion Source include:

  • Least expensive of the Ionizer choices
  • PPM level detection with only a Faraday Cup detector
  • Ionizer easily replaced in the field in minutes
  • Dual thoriated iridium filament

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