GEMINI Inline System
For a wafer dependent process management and a statistical process optimization in the manufacturing of solar wafers and cells it is reasonable to analyse the grain structure of multicrystalline and mono-like wafers. The GEMINI grain analysis system is able to extract from the natural grain structure of wafers several data, e.g.: Number of grains and size of each grain, Overall length of grain boundaries, Recognition of twin grains, Percentage of area of largest grain. The system is available as a stand alone machine for measurements of wafers in a laboratory environment and also as inline tool e.g. for quick mono-like characterization. The GEMINI grain analysis system acquires multiple images of one wafer. This is necessary to get reliable results of the grain structure on the wafer. Only in using different illuminations for one wafer it is possible to make every single grain visible.