Ionicon Analytik Ges.m.b.H.

- Model T-1000 - Airborne Molecular Contamination (AMC) Monitor

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The AMC-Monitor is a modular and flexible platform for Airborne Molecular Contaminations (AMC) monitoring in semiconductor applications such as: FOUP analysis with a focus on VOC and condensables incl. full integration with Pfeiffer Vacuum APA 302 pod analyzer. Clean-room monitoring in fabrication plants: automated detection of AMC at multiple sampling points with an integrated multiplexing system, directly in the fab at variable locations and even at the tool-level. Monitoring of outside and intake air: automated fence line monitoring incl. alarm levels, up- and downstream filter testing.

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The custom-made analyzer is based on the most suitable IONICON PTR-TOFMS series instrument for the particular application and the Automated Measurement and Evaluation AME software suite with pre-set recipes for your monitoring challenge. The scalable multiplexing solution minimizes analysis costs per sampling point.

Expect these benefits in combination with the advantages only a time-of-flight (TOF) based analyzer offers:

  • incredible speed
  • high sensitivity
  • enhanced separation for complex samples.

The IONICON AMC-Monitor is the ideal tool for current and future challenges in the semiconductor industry.

Loaded with…

  • Several soft chemical ionization modes – wide component range
  • Renowned PTR-MS and SRI-MS technology
  • AME monitoring solution software
  • Enhanced separation, identification and quantification capabilities
  • Full mass spectral analysis in a split second
  • On-line LOD (limit of detection) < 1 pptv
  • Response time below 100 ms
  • On-board multiplexing (multiple sampling lines) and calibration

Expect this…

  • Simultaneous quantification of several hundred substances in real-time
  • Pre-set expert recipes to choose from for the analysis of target species
  • Simple graphical user interface
  • Clean-room AMC monitoring, filter tests, fence-line and supply air monitoring
  • FOUP contaminations detection integrated with Pfeiffer Vacuum APA 302 pod analyzer
  • Industrial integration via Modbus TCP
  • Remote control and data reporting 
  • Fit for future updates and upgrades

FOUP Monitoring

Analysis of AMC contamination in FOUP – focus on VOC and condensables. Full integration with Pfeiffer Vacuum APA 302 pod analyzer available.

Typical Relevant Substances:

  • Acetone
  • IPA
  • Toluene
  • CNF / PFTBA
  • COF
  • MEK
  • PGME

Fab Clean-room Monitoring

Automated monitoring of AMC at multiple sampling points.

Typical relevant substances:

  • Trimethylsilanol, HMDSO
  • PGMEA, PGME
  • Siloxanes
  • Acetic Acid
  • Ethyl Acetate, Ethyl Lactate
  • BTEX
  • Chloro-carbons
  • Perfluoro-carbons

Monitoring of Outside Air

Automated fence line monitoring incl. alarm levels.

Typical Relevant Substances:

  • Organic acids (e.g. acetic acid, formic acid)
  • Aldehydes, Ketones, Glycolic compounds
  • Pyrolysis Products from biomass burn
  • VOC & Condensables (sticky compounds)

Sulfur Compounds

  • H2S,
  • Mercaptans,
  • Thioethers

Nitrogen Containing Compounds

  • Acetonitrile (biomass burning)
  • NH3,
  • Amines

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