Nanoscope Systems, Inc
Model NS-3600 -Accurate Optical 3D Measurement
NS-3600 is a high-speed confocal laser scanning microscope (CLSM) for precise and reliable 3-dimensional (3D) measurement, especially designed for the laboratory use performance. It provides three-dimensional descriptions of target objects from a series of optically sectioned images using a very straightforward algorithm, with which the cross-sectional image is directly converted to the 3D profile data. This unique raw cross-sectional image, which is intuitively interpretable, makes the surface profile data definitely superior to that from the other optical technologies
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confocal laser scanning microscopy
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- High resolution nondestructive optical 3D measurement
- Real time confocal imaging
- Various optical zoom
- Simultaneous bright field and confocal imaging
- Automatic gain search with fine auto focus
- Inclination compensation
- Easy analysis mode
- Precise and reliable high-speed height measurement
- Inspection of features through semi-transparent substrate
- No sample preparation
- Image stitching for wide range inspection
NS-3600 is a promising solution for the measurement of height, width, angle, area, and volume of micro and submicro structures such as
- Semiconductor : IC pattern, bump height, wire loop height, defect inspection, CMP process
- FPD product : Touch panel screen inspection, ITO pattern, LCD column spacer height
- MEMS device : 3D profile of structure, surface roughness, MEMS pattern
- Glass surfaces : Thin film solar cell, solar cell texture, laser pattern
- Material researches : Tooling surface inspection, roughness, crack analysis