PureAire Monitoring Systems, Inc

- Air check O2 Monitor for Vacuum Transfer Chambers and Load Locks


The Air check O2 Monitor for Vacuum Transfer Chambers and Load Locks is a compact gas monitoring system that’s ideal for the continuous monitoring of semiconductor process tool transfer chambers and load locks. Unlike electrochemical sensor cells, the Air check O2 zirconium cell provides stable oxygen readings even in areas where temperature and humidity levels are changing. And, the Air check O2 is one of the only monitors suitable for monitoring directly in a vacuum.

The heart of the monitoring system is a long lasting zirconium sensor, which detects low oxygen conditions within seconds and provides accurate measurements over a wide temperature and humidity range. The zirconium O2 sensor cell will operate continuously for 10 or more years and requires an absolute minimum of maintenance. There are no zero or span calibration pots to adjust and when compared to disposable type sensors, our long life zirconium O2 sensor can save up to $475 annually and will pay for itself in just over 3 years!

The Air check unique sensor mounts directly into chambers or load locks through the use of a KF type vacuum fitting. Monitoring oxygen directly under vacuum eliminates the need to change the environment back to ambient and can improve thru put. The Air check O2 Deficiency Monitor also provides stable readings even in areas that contain high electro-magnetic fields.

  • Monitors in Vacuum 10-3 torr
  • No Maintenance Zirconium Cell
  • No Calibration Required
  • No Drift to Environmental or Temperature Changes
  • 10 + year Sensor Life
  • Local Digital Display, 4-20 mA Analog Output
  • Joystick Adjustable Dual Alarm Relays
  • Integral Computer Controlled Electronics

Connects to DCS and PLC Controls
The Air check O2 Deficiency Monitor is 24 V DC powered and transmits continuous oxygen concentration levels to any distributive control system or programmable logic controller.

PureAire’s Oxygen Sensor Cell
The Air check O2 Deficiency Monitor uses an exclusive Current Limiting Zirconium Oxide Oxygen sensor that never requires a reference gas. Unlike concentration type zirconium cells that must have a reference gas, PureAire’s O2 monitor can operate in 100 % nitrogen environments. Capable of detecting 0 % up to 95 % oxygen levels, the current limiting O2 sensor operates at a lower temperature than competitive concentration type cells. The average life of PureAire’s O2 sensor is over 8 years in most environments. The Air check O2 Deficiency Monitor never needs calibration. The earth is a wonderful source of calibrated oxygen and under ambient levels; PureAire’s O2 monitor is continuously being challenged to 20.9 %. There are no zero or span adjustments to make; the only optional response test required is to subject the O2 system to nitrogen periodically.

O2 Monitor System Features
The Air check O2 Deficiency Monitor is available in many different configurations perfect for OEM process tool installation. PureAire uses a sophisticated built-in CPU that is flexible to provide users with a low cost basic display only monitor or a full featured monitor with dual level, user selectable alarm relays. Other options available are Modbus digital communications or full Wireless radio communications.

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