TAPI - Model ODS Series - High Concentration High Purity Ozone Delivery Systems
From Ozone Generators & Controllers
The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is a complete turnkey solution that is custom configured to plug and play with most semiconductor tools. Its microprocessor based controller is designed to servo control the ozone delivered to the tool based on user provided setpoints. The ODS system includes a multi-channel ozone leak detector and an exhausted enclosure where all the process gas lines and fittings are double contained.
Features:
- High purity water cooled ozone generator up to 350 g/Nm3?
- State of the art high concentration monitor?
- Mass Flow Controllers to monitor and control the ozone and the feed gases?
- Complete safety interlock and EMO system?
- Supports up to 4 independent servo control loops?
- Mounted in an 19 inch rack exhausted enclosure on casters?
Specifications:
- High Purity Ozone Generator: Up to 350 g/Nm3
- Flow Rates: Up to 100 lpm regulated by built-in MFCs
- Ozone Output Pressure: Regulated to 30 PSIA
- Controller: Up to 4 independent servo control loops
- Ozone Monitor: UV absorption analyzer with range from 0 to 400 g/Nm3
- Ozone Leak Detection : Five channels UV absorption analyzer
- Feed Gas : High Grade O2 with N2 doping
- Ozone Process Output Channels : Up to 4
- Enclosure Dimensions : Exhausted type: 72 x 24 x 31' (1844 x 615 x 804 mm)
- Cooling Water : 17ºC to 20ºC (63ºF to 68ºF)
- Warranty: 1 year
Applications:
Given its versatility and ease of installation and use, the ODS - Ozone Delivery System has been deployed in a wide range of wafer processing applications requiring ozone at different concentration and flow rate such as:
- Semiconductor
- Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD)
- Oxide growth
- Surface conditioning
- Particle cleaning
- Photoresist removal
- Ashing
Customer reviews
No reviews were found for TAPI - Model ODS Series - High Concentration High Purity Ozone Delivery Systems. Be the first to review!