TESCAN - Model BSE - Backscattered Detectors
Backscattered electrons (BSEs) are high-energy electrons generated as a result of elastic interactions between the primary electron beam and the sample. The range energy of BSEs is from 50 eV up to the energy of the electron beam. BSEs are emitted from a broad region within the interaction volume (the region in the sample where all the beam-sample interactions take place) with a range of penetration that can be as deep as a few microns for high-energy beams to hundreds or even a few tens of nanometres for low beam energies
TESCAN offers variety of premium backscattered (BSE) detectors in two main categories:
Scintillation crystal-based BSE detectors
TESCAN systems are equipped with first-class crystal-based scintillators. These types of detectors achieve high sensitivity and high resolution in atomic number (0.1 Z) for enhanced imaging quality. Their large detection area allows the acquisition of quality images at high scanning speeds.
The main advantages of the scintillation crystal-based detectors are:
- High imaging rate up to 20 ns / pixel
- Temperature stability (no signal drift)
- Low noise, super-clear image
- Inert to IR light of the chamber scope
- Suitable for low vacuum observations
TESCAN has designed different scintillators detectors which – depending on the system – form part of either standard or optional configurations.
BSE detector (fixed) is an annular scintillation crystal-based BSE detector placed in the optical axis of the SEM column directly under the objective lens allowing high-quality imaging at low and high vacuum. It provides both topographical and compositional contrast from wide-angle BSEs, suitable for imaging low-contrast specimens such as biological samples. It achieves a resolution in atomic number of 0.1 Z.
Retractable BSE detector. With the same features and capabilities as the fixed version, the advantage of this detector is that it can be retracted whenever not in used. This feature allows freely adjusting the working distance to optimal values for SE imaging. Retractability can be either manual or motorised.
Mid-Angle BSE detector located inside the column allows low-noise volume compositional mapping. It collects medium-angle BSEs providing compositional contrast as well as topographical information of the sample. Suited for imaging at short working distances. The Mid-Angle BSE detector is a unique integral part of the universal detection system in Triglav™, the newly designed TESCAN ultra-high resolution electron column. In the beam deceleration mode (BDM), this detector collects BSEs. This detector is capable of operating over the entire range of beam energies: 200 eV to 30 keV.
4-Quadrant semiconductor (solid-state) BSE detectorsRetractable 4Q BSE detector. This is an annular 4-quadrant solid-state detector that acquires four independent BSE signals emitted from different directions. The SEM electronics adjusts the signal from all four quadrants separately and /or mixes, adds or subtract into a resulting image. Thus, advanced imaging features such as compositional and topographical mode or four independent images optimised for 3D reconstruction of the sample surface are possible. 3-dimensional imaging is possible thanks to the software that combines the four signals from different directions in one image.
- Separated signal from all four quadrants
- Mixed signal into a resulting image
- Compositional and topographical mode
- 3D reconstruction of the sample surface
- Retractable design (motorised option)
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