Tiger-i - Model 2000 - HF Trace Gas Analyzer
From Ambient Air and Stack Gas Analyzers
State-of-the-art trace gas analyzer for detection & continuous monitoring of hydrogen fluoride (HF) Airborne Molecular Contaminants (AMCs) in semiconductor cleanrooms. You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy Tiger Optics’ Tiger‑i 2000 series analyzers to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.
Product Details
In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern. So much so that the International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving and sustaining low defect rates on devices.
With a particular focus on the major contributors to the “chemical contamination” element of AMCs, the Tiger‑i 2000 series analyzers can detect and continuously monitor HF and other critical contaminants.
The new Tiger Optics AMC Cart adds additional flexibility by providing a mobile platform that can be moved quickly to different critical monitoring points (see brochure for more details).
A compact and user-friendly solution for monitoring airborne molecular contaminants (AMC), the Tiger‑i 2000 HF offers:
- Fast, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS)
- Drift-free, with calibration traceable to the world’s leading reference labs
- Lowest Cost of Ownership—maintenance-free
- Best-in-class sensitivity and extraordinarily wide dynamic range
Applications
- Air Quality
- Airborne Molecular Contaminants
- HF Alkylation Unit Emissions
- Research & Development
Specification
Performance
- Operation range See Detection Capability table
- Detection limit (LDL, 3σ or 24 h peak-to-peak) See Detection Capability table
- Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
- Accuracy (greater of) ± 4% or the LDL
- Zero drift None
- Speed of response 2 minutes to 80%
- Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
- Storage temperature -10° to 50°C
Gas Handling System and Conditions*
- Wetted materials Sample gas compatible
- Gas connections 1/4' male VCR inlet & outlet
- Leak tested to 1 x 10-9 mbar l /sec
- Inlet pressure 0 – 15 psig (1 – 2 bara)
- Outlet pressure Vacuum (<10 Torr)
- Flow rate ∼1 slpm
- Sample gases Ambient air, clean dry air (CDA), or N2
- Gas temperature Up to 60°C
Dimensions
- Standard sensor 8.73' x 8.57' x 23.6' (222 mm x 218 mm x 599 mm)
- Sensor rack 8.73' x 19.0' x 23.6' (222 mm x 483 mm x 599 mm)
Weight
- Standard sensor 33 lbs (15 kg)
- AMC cart (excl. sensors and pumps) 260 lbs (118 kg)
- Electrical 0-5 VDC, isolated 4-20mA or 0-20 mA output
- Alarm indicators 2 user programmable, 1 system fault, Form C relays
- Power requirements 90 – 240 VAC 50/60 Hz
- Power consumption 40 Watts max. per sensor
- Signal output Isolated 4–20 mA per sensor
- User interfaces 5.7' LCD touchscreen, 10/100 Base-T Ethernet, RS-232, 802.11g Wireless (optional), Modbus TCP (optional)
- Patents 0.2 ppb
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