ULVAC - Model GLD Series - Vacuum Pumps
From Vacuum Pumps
Combine high performance, low vibration, and low noise, Gas ballasting for solvent vapor removal, Forced oil supply offers optimum lubrication during pumpdown, Anti-suckback device protects the chamber during power failure.
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Applications
- Chemical, analyzer and laser systems
- Vacuum pumping system
- Backing pump for SEM
- Semiconductor, sputtering, and vacuum evaporation equipment
- Vacuum and freeze drying
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