Zygo Corporation

- Fizeau Interferometer System



ZYGO's Verifire interferometer system provides fast high-precision measurements of plano or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Measure glass or plastic optical components – like flats, lenses, and prisms – and even precision machined metal and ceramic surfaces.

A true laser Fizeau design, the Verifire™ system expands upon ZYGO's unmatched experience in surface form metrology. The on-axis configuration combined with ZYGO's patented acquisition algorithms and full-featured Mx™ metrology software enables high-precision surface form metrology with advanced analysis capabilities.

Confident Metrology for a Dynamic World

Technology for optical metrology has advanced significantly in recent years. In the past, environmental effects needed to be carefully controlled to achieve reliable measurements. Today, ZYGO offers technologies that enable reliable measurements in harsh environments where vibration and air turbulence can be extreme.

QPSI™ Vibration Tolerant Interferometry eliminates ripple in phase data caused by small vibrations in a cavity, while maintaining a high-precision on-axis measurement configuration. ZYGO's proprietary QPSI data acquisition is enabled by a ZYGO-manufactured high-power HeNe laser source and patented software algorithms – no other vibration tolerant acquisition technique compares.

DynaPhase® Vibration Insensitive Interferometry freezes vibration and air turbulence, enabling metrology in extreme environments. Patented in-situ calibration ensures precision and confidence in metrology that can't be matched. NEW The DynaPhase® acquisition mode is now available as an option on the Verifire system, adding even more value to this workhorse interferometer.

Stabilized, Long-life, High-Power Laser

ZYGO's proprietary laser source is designed and manufactured in Middlefield, CT. The laser exceeds the power and lifetime of the commercially available HeNe lasers typically used in laser interferometer products. With a lifetime rating exceeding 60,000 hours, our laser is backed by an unmatched3-year warranty, minimizing downtime and maximizing your ROI.


The Verifire system is compatible with standard ZYGO interferometer accessories which expand the system's versatility. This includes our ZYGO certified reference optics that ensure optimum performance from our laser interferometers.

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