Yamato Scientific America Inc.

- Model PR500/510 - Gas Plasma Reactor



Compact, barrel type low temperature ashing device designed with a large chamber made of quartz considered almost completely resistant against most plasma processes.

  • Compact, space saving design with oscillation section integrated with a portion of the chamber
  • Outstanding operability and safety with the automatic tuning system as standand component
  • Equipped with a large quartz chamber (ø215mm) which can process big testing sampless

  • Removal of photoresist
  • Cleaning of parts
  • Surfactant treatment
  • Micro polishing
  • Corresponds to wafer and glass substrate

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