Zygo Corporation

- Displacement Measuring Interferometer Systems



ZYGO is the technology and application support leader in position metrology and heterodyne displacement interferometry, offering complete solutions and support for your OEM metrology application. ZYGO's technologies and OEM products have been field proven over many years of use in leading-edge production facilities.

Configure the System that's Exacty Right for You ZYGO offers a variety of...

This modular approach allows you to configure a system that best suits your needs by selecting the most appropriate components. Be sure to review the system configuration examples.

As always, we're here to help; contact your local ZYGO sales representative to assist with the selections.

  • Lithography tools: optical lithography steppers and scanners, e-beam & laser mask writers
  • Metrology tools: Mask and wafer inspection and measurement tools, CD-SEMs
  • Calibration: Measurement and calibration of high resolution or high frequency mechanical motions

  • Heterodyne displacement interferometry.
  • Highly stable, easy to align, and insensitive to signal amplitude changes.
  • Extremely robust for OEM applications.
  • A single laser source can support multiple axes.
  • High signal to noise phase measurements enable high precision and eliminate false counts, even at zero slew rates.

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