Real Time Trend Mode
This screen shows low level detection of Nitric Acid vapor in a semiconductor cleaning process. The concentration range falls within 100ppb to 50ppm. Analysis speeds may be down as low as 10ms / gas. Data is continuously stored in WRT time and may be reviewed at any time during analysis.
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Descriptoin
Up to 64 different separate gas components may be added by simply including the relevant mass number/s in the software analysis matrix. Absolute Concentration verses time values (ppb, ppm, %) are possible by creating a matrix in software that contains the gas component, the relevant mass number/s and the maximum span concentration of the gas component of interest. There is only a need for a single “span” gas mixture to be provided to make a calibration of concentration and takes only a few seconds to perform. It is also possible to make a “zero” gas calibration if extra low concentration are expected within the analysis.
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