Spectra Stream
From Software Products
To provide high sensitivity detection of impurities (low ppb). To reduce the time response typically associated with FTIR (from minutes to seconds). To reduce the effects of spectrometer drift.
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Spectra Stream Parameters
- W = Sampling Window Size (# sampling scans)
- b = Number of Backgrounds per sampling window
Instrument Parameters
- Bomem MB100
- DTGS Detector (0.4 cm/sec)
- 2 cm-1 instrument resolution
- Time Resolution 11 sec. per sample + background
- CIC Ranger Gas Cell (1.7 liters / 9.6 meters)
- Flow Rate 1slpm
Spectra Stream Advantages for Process Control
- Early Detection of changes in impurity concentrations (seconds)
- Real Time monitoring of process gases
- Reduction of the interfering effects of spectrometer drift
- Assures reliable and controlled etching of semiconductors wafers
Downloads related to this software
IRGAS with SpectraStream Technology
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