Spectra Stream
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To provide high sensitivity detection of impurities (low ppb). To reduce the time response typically associated with FTIR (from minutes to seconds). To reduce the effects of spectrometer drift.
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Spectra Stream Parameters
- W = Sampling Window Size (# sampling scans)
- b = Number of Backgrounds per sampling window
Instrument Parameters
- Bomem MB100
- DTGS Detector (0.4 cm/sec)
- 2 cm-1 instrument resolution
- Time Resolution 11 sec. per sample + background
- CIC Ranger Gas Cell (1.7 liters / 9.6 meters)
- Flow Rate 1slpm
Spectra Stream Advantages for Process Control
- Early Detection of changes in impurity concentrations (seconds)
- Real Time monitoring of process gases
- Reduction of the interfering effects of spectrometer drift
- Assures reliable and controlled etching of semiconductors wafers
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