CIC Photonics

Spectra Stream

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To provide high sensitivity detection of impurities (low ppb). To reduce the time response typically associated with FTIR (from minutes to seconds). To reduce the effects of spectrometer drift.

  • W = Sampling Window Size (# sampling scans)
  • b = Number of Backgrounds per sampling window

  • Bomem MB100
  • DTGS Detector (0.4 cm/sec)
  • 2 cm-1 instrument resolution
  • Time Resolution 11 sec. per sample + background
  • CIC Ranger Gas Cell (1.7 liters / 9.6 meters)
  • Flow Rate 1slpm

  • Early Detection of changes in impurity concentrations (seconds)
  • Real Time monitoring of process gases
  • Reduction of the interfering effects of spectrometer drift
  • Assures reliable and controlled etching of semiconductors wafers

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