Liquid Waste Monitoring

Particle Detection in Liquids with High Viscosity or High Molecular Weights

Introduction Laser-based particle counters have been used extensively to detect particles in DI water and process chemicals such as hydrofluoric acid. Not as many users have applied these tools to monitoring contamination in liquids with higher viscosity and/or molecular weights such as photoresist and antireflective coatings. Monitoring particles in such fluids is important for both th