Dry Vacuum Pump (Process Pump) Equipment
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Manufactured by Kashiyama-USA Incbased in USA
Available to large size wafer & FPD; Large capacity available by combination. Larger than 150kL/min also available on demand. Shorter cycle-time; Large capacity around atm. pressure can achieve high speed pumping best for large L/L chamber. ...
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Manufactured by ULVAC GmbHbased in GERMANY
Dry Vacuum Pump CR series Ver.B is an air-cooled roots type dry vacuum pump. IT complies with international standard (CE,cTUVus). Stable operation and extended lifetime are possible because there is no oil inside of the pump head and no contact between rotor and ...
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Manufactured by Apply Italiabased in ITALY
pumps operate according to the following principle: the operating volume of the pump increases from zero to a maximum value, sucking in air from outside, then this volume is isolated and progressively reduced, so to push the air out through the exhaust duct. Dry pumps can work, in continuous service, both at atmospheric pressure ...
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based in GERMANY
The EV-S has the lowest power consumption in its class. The flexible rotation speed and idle mode make their contribution to save energy. In clean applications no N2 purge or nitrogen is ...
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Manufactured by Ebara Technologies Incbased in USA
With EBARA’s unique compact construction with low noise and low power consumption, this air-cooled pump series needs no coolant water enabling flexible installations suitable for many vacuum applications within various environments such as production plants, testing and research laboratories. The EV-A03 Series vacuum pumps ...
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Manufactured by Becker / Gebr. Becker GmbH & Co.based in GERMANY
100% Oil-less operation. Quiet. Cool operation. Long vane life. Inlet filters included. Discharge silencers. Direct drive. Vacuum regulators included. Minimal ...
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Manufactured by Ebara Technologies Incbased in USA
The EV-A10 Series air cooled dry vacuum pumps have industry leading specifications. The non-contact, multi-staged roots technology is designed for reliable, particle free vacuum generation. Compact form factor and air cooling for easy installation. These are ideal drop in replacements for wet pumps and scroll ...
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based in GERMANY
The EV-M with its multi-stage lobe design is best used for harsh duty applications. It has a higher H2 pumping speed compared to screw type vacuum pumps. The idle mode provides additional energy savings. The EV-M is powerful with low energy demands. Water-cooled EV-M for harsh processes and reduced ...
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Manufactured by Ebara Technologies Incbased in USA
With EBARA’s unique compact construction with low noise and low power consumption, this air-cooled pump series needs no coolant water enabling flexible installations suitable for many vacuum applications within various environments such as production plants, testing and research laboratories. The Model EV-A06 Series vacuum ...
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Manufactured by ORION Machinery Co., LTD.based in JAPAN
Degree of Vacuum 1 to 101.2 kPa or higher. Motor Output 1.5 kW. Flow Rate 0 to 29.7 m3/h. Ultimate Pressure of 100 Pa [abs] or Lower. Degree of Vacuum: 101.2 kPa or ...
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based in GERMANY
Water-cooled dry vacuum pump ESR with superior corrosion resistance. The ESR is perfect for medium to harsh applications with low ultimate pressure. The variable pumping speeds ensure a highly flexible usage. Low noise level and low vibration are key features of the ESR ...
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Manufactured by Economy Process Solutions Private Limitedbased in INDIA
Hook and Claw Dry VCX Series dry pump is designed to operate without the need for lubricants, making it a suitable choice for applications where contamination from lubricants is a concern. The modular construction of the VCX Series allows for easy maintenance and repair, as individual compartments can be easily accessed and replaced if ...
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Manufactured by Tuthill Corporation - Tuthill Vacuum & Blower Systemsbased in USA
Simple, robust design can handle process by-products – liquids, condensate, and even small particles. No oil or water in contact with process. No contact between operating components in the casing. Full pumping speed from atmospheric pressure down to 1 Torr; ultimate pressure 0.1 Torr (.05 Torr on Model KDP-800). Quiet operation – ...
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based in GERMANY
The EST qualifies for harsh applications generating reactive chemical by-products. It manages large gas loads and enhanced powdery by-products. The compact design allows for increased operating temperatures and corrosion resistant material. Water-cooled EST dry vacuum pump for powdery, corrosive ...
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based in GERMANY
Air-cooled EV-A dry vacuum pump for excellent performance at atmospheric pressure. The EV-A is ideally suited as an air-cooled dry pump for a non-reactive, general vacuum. The EV-A is the perfect solution, particularly for lithium-ion battery production. A model with bearing flushing is ...
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Manufactured by I.VA.CO. S.R.L.based in ITALY
Oil-free dry vacuum pumps belonging to the DR series are blade rotary types with rotor supported by bearings, flanged motor and air cooling, suitable to operate without any lubrication. Their main features are heavy construction design, easy maintenance, absence of any oil fog on the discharge. The pumps can be used in any ...
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Manufactured by Kashiyama-USA Incbased in USA
Air Cooled, Point of Use Dry Pump. Lower COO by virtue of extended MTBR. 3 year routine maintenance recommended. Replacement for messy Scroll and Rotary vane ...
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Manufactured by SVC Co.,Ltd.based in SOUTH KOREA
Screwstar Dry pumps are designed under SVC's unique screw profile engineering to fulfill wide range of chemical and industrial processes by rotating a paired screws that efficiently admit gases from inlet into the pump inside and compress through the screws' swept volume toward the discharge. The hybrid screw design with engineered ...
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Manufactured by Gardner Denver Nashbased in USA
Suction Capacity: 50 to 1,500 ACFM (85 to 2,550 m3/h). Vacuum Range: 0.01 to 760 Torr (0.01 to 1,013 ...
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Manufactured by Kurt J. Lesker Companybased in USA
Features: Lubricant-free within the vacuum envelope and hermetically sealed means a totally clean and dry vacuum to prevent cross contamination. Advanced scroll-form and tip-seal technologies deliver best in-class vacuum performance and unrivaled ultimate vacuum levels. Unique tip seal design significantly ...
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