Showing results for: High-Purity Ozone Delivery System (Ozone Generators) Equipment
2 equipment items found
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Manufactured by Teledyne APIbased in USA
The Mini ODS is a compact, integrated ozone delivery system designed to produce ozone concentrations of 21% w/w, 320g/Nm3 for a wide range of wafer processing applications. It is a very compact yet complete ozone delivery system, including: a high ...
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Manufactured by Teledyne APIbased in USA
The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. ...
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