Advanced Spectral Technology, Inc. (AST) products

High-performance system platform designed for applications that require high-speed inspection and precision measurement that can be deployed in a 24/7 high-volume manufacturing or development environment.

While standard Inspection & Metrology based systems provide advantages in some areas, they may not always be the best optimized solution.  In these cases, AST has extensive experience and expertise developing high-performance systems that address a specific customer’s process / factory automation requirements.  These requirements can consist of achieving higher throughput, UPH/M², enhanced process automation for high-speed pick & place (part-handling), binning / sorting, and/or integrating inspection / metrology capability into a fully automated line / production cell.  AST has developed these application / process specific Inspection & Metrology Systems compatible with cleanrooms down to Class 10 (ISO-4).

These systems are developed around processes and technology that are designed for optimum correlation across deployed systems and operation in 24/7 manufacturing environments.   AST’s capability to integrate multiple axes, vision systems, different and varying sensor types and alignment & bonding / curing technology within a fully-integrated turnkey system platform makes AST an ideal collaboration and development partner to meet your requirements.     

Process automation systems are by default developed and optimized to address specific process requirements. These solutions leverage core capabilities and competencies in targeting those metrics that drive the need to automate a process and improve quality, reduce handing / process defects, improve process control / yield, improve process performance & reliability, etc.

High-performance system designed for applications where high-speed defect detection and precision measurements on wafers and other parts are required. Can be configured as a dedicated production tool or as a versatile process development system.  The system provides the ability to sort / bin wafers per defined criteria.

AST offers flexible solutions for inspection, defect detection, and metrology at wafer, die, and/or film frame level.  Imaging optics are configurable across a wide spectrum including Visible, NIR, SWIR, & UV wavelengths.  Visible imaging options include Brightfield, Darkfield, Differential Interference Contrast (DIC), Polarized, plus other imaging techniques.  Coaxial, oblique, and backlight illumination options can be integrated for optimum image quality.  AST can also integrate other sensor technology such as Spectrophotometers, Ellipsometers, Profilometers, etc. to combine multiple tool metrology tasks into a single system, reducing operation and tool counts and handling requirements.

Detection of thermally identifiable defects either visually or thermo-graphically with the MWIR band (3-5 microns).  Magnifications from Macro to 1x, 2.5x, 4x and 5x.  Precision 0.10µm resolution 200mm travel motorized stage for accurate navigation and metrology capability.

Provides similar detection of thermally identifiable defects with the MWIR band (3-5 microns).  Equivalent magnifications from Macro to 1x, 2.5x, 4x and 5x.  The platform utilizes a benchtop configuration with precision 150mm travel manual coarse and fine positioning X-Y stage enabling navigation and metrology functionality.

The AST-300-PCI system utilizes a larger format system platform capable of inspecting an entire 300mm probe card at wafer level or a fully assembled probe card that is in its final integration state.  Since probe cards can vary in size, shape, and weight, AST can help you determine if an AST-300-PCI platform meets all your probe card designs or if an AST-500 platform is better suited for addressing your specific probe card requirements and design variations.  This system platform can also be leveraged to address automated inspection at the wafer and/or sub-assembly level providing a solution to keep critical processes in control and meeting required quality metrics.