Angstrom Sciences, Inc. products

Angstrom Sciences offers state-of-the-art magnetrons for virtually any standard sputtering process. But we know that every application is different. That’s why we’ve developed a unique, modular approach that specifically adapts to your specifications.

Angstrom Sciences` circular magnetrons have become recognized as the new standard of the sputtering industry, because in addition to the advanced features of the Angstrom Advantage™, they offer a host of other performance advantages as well.

Today’s compact disk industry faces an increasingly complex production challenge. Although the demand for film uniformity remains a constant, the economics of the process varies dramatically with changing material costs. For many disk manufacturers, that use to mean installing two significantly different systems - one to achieve maximum throughput of low-cost materials and one to achieve high target utilization of precious metals and other expensive target materials. Angstrom Sciences’ CD / DVD Magnetron is designed with a drop-in magnet array. So technologists can standardize on a single system, and simply change arrays in order to optimize performance results. Angstrom Sciences’ CD / DVD Magnetrons are available in 6` OD.

Angstrom Sciences’ direct cooled / indirect cooled circular magnetrons provide maximum flexibility to your sputter process. Its versatile design can operate in direct cooled or indirect cooled mode.

For applications that require the substrate to be exposed to extended periods of high thermal contact, Angstrom Sciences’ High Temperature Circular Magnetrons are optimized with ceramic insulators and vacuum seals that allow the cathode to sustain performance parameters while under high heat conditions. High Temperature designs are available that will run at 200, 300, and 450 degree Celsius. High Temperature Circular Magnetrons are designed for operation in the 10^-9mTorr range and are specially engineered to allow for variations that may occur throughout thermal cycling without leaks or film quality deviation.