CIC Photonics

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CIC Photonics Articles

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  • Detection and measurement of toxic gases from destructive testing of batteries

    Detection and measurement of toxic gases from destructive testing of batteries

    Problem Statement New formulations of organic-compound-based batteries for vehicle use must be tested for release of potentially harmful and toxic gases if crushed in accidents. Potential gases include hydrocarbons, fluorocarbons, and hydrogen ...

  • Establishment of the encoded photometric (ep-ir) spectrometer’s ability to detect the lowest possible level of moisture

    Establishment of the encoded photometric (ep-ir) spectrometer’s ability to detect the lowest possible level of moisture

    Problem Statement The race for a system that can detect the lowest possible level of moisture is seemingly everlasting. As the race continues we have begun to explore the options of using an EP-IR spectrometer coupled with DID Photonics Integrated ...

  • The precision, accuracy, and reproducibility of IRGASTM systems

    The precision, accuracy, and reproducibility of IRGASTM systems

    Problem Statement What is the precision, accuracy, and reproducibility of an FTIR instrument? A seemingly relatively easy question with a not so relatively easy answer. Unfortunately, there is no straight-forward answer to this question, and the ...

  • FTIR resolution requirements for industrial gas analyses

    FTIR resolution requirements for industrial gas analyses

    FTIR Spectroscopy FTIR Spectroscopy is a widely used technique for gas analyses in industrial applications. It is a technique used in the semiconductor industry for measuring the purity of cleaning, etching, and epitreatment gases used with various ...

  • Measurement of moisture in HBr

    Measurement of moisture in HBr

    Introduction Moisture in corrosive gases will accelerate the rate of metal corrosion in gas supply systems which, in turn, can lead to their premature failure. For this reason, it is important to monitor moisture levels in these gases. FTIR is an ...

  • IRGAS XFlo: process gas FTIR system for flange mounted applications

    IRGAS XFlo: process gas FTIR system for flange mounted applications

    Introduction When doing process tool or exhaust abatement tool installations, it is desirable to monitor the exhaust gases as a means of controlling or setting up the tool 1, 2. FTIR, with its rapid analysis speed, high sensitivity, and ease of ...

  • Leak detection in semiconductor fab gas processes

    Leak detection in semiconductor fab gas processes

    Problem Statement Often times in semiconductor fabs moisture levels are monitored to ensure that products aren’t damaged by excess moisture in the process. If there are above normal levels of moisture, pinpointing the source of that moisture ...

  • Detection of moisture in ammonia gas

    Detection of moisture in ammonia gas

    Problem Statement As technologies advance, so does the request for ultra high purity ammonia. Ultra high purity (UHP) ammonia is used in the semiconductor industries, production of flat panel displays, and a number of other applications. Due to ...

  • Continuous monitoring of moisture present inside a process chamber

    Continuous monitoring of moisture present inside a process chamber

    Problem Statement Moisture inside a process chamber is a big silent killer during wafer production. When production yield goes down, it is hard to pinpoint the source of the problem. Most of the time wafers need to be sent to labs for analysis, ...

  • Determining levels of moisture permeation through Kalrez and Chemraz o-ring material

    Determining levels of moisture permeation through Kalrez and Chemraz o-ring material

    Problem Statement As the manufacturers of corrosive resistant gas cells we are often called upon to design a system for the detection of moisture in various gases. Most of our requests are to detect moisture in the low ppb levels. This can be a ...

  • Optical couplers: key hardware for high quality FTIR spectroscopy

    Optical couplers: key hardware for high quality FTIR spectroscopy

    Description Optical couplers are used to take the light coming from the source of a FTIR and route it through the sampling accessory and into the FTIR detector. This is an essential process in the effective use of the FTIR spectrometer. Therefore, ...

  • Detection of early PFA seals (perfluoroalk-oxyethylene) degradation exposed to process gases inside a reactor chamber

    Detection of early PFA seals (perfluoroalk-oxyethylene) degradation exposed to process gases inside a reactor chamber

    Problem Statement Replacement of PFA seals inside the reactor chamber is performed according scheduled maintenance and life expectancy of the seals. Early degradation of seals goes completely undetected until there is a complete failure of the ...

  • Monitoring the performance of moisture purifiers for process gases

    Monitoring the performance of moisture purifiers for process gases

    Problem Statement Moisture purifiers are a big aid in keeping moisture levels under control inside a process chamber. They are provided by manufacturers with certain life expectancies, which vary depending on the moisture content of the gas being ...

  • SPGAS: Specialty gas analysis software

    SPGAS: Specialty gas analysis software

    About SPGAS SPGAS is a user-friendly, turnkey FTIR software package designed specifically for the analysis of gaseous constituents. While providing all of the control features of a standard FTIR software package for Bomem spectrometers, SPGAS also ...

  • FTIR Spectroscopy

    FTIR Spectroscopy

    Fourier Transform Infrared (FTIR) Spectroscopy bases its functionality on the principle that almost all molecules absorb infrared light. Only the monatomic (He, Ne, Ar, etc) and homopolar diatomic (H2, N2, O2, etc) molecules do not absorb infrared ...

    Jorge. E. Pérez and Richard T. Meyer

  • Beer`s law

    Beer`s law

    The Beer-Lambert relationship (or Beer`s law) states that the concentration C is directly proportional to the absorbance A. Generally, this relationship is more often applied by comparing the height of a maximum absorption peak of a reference gas to ...

    Jorge. E. Pérez and Richard T. Meyer

  • QMax - stand-alone quantification analysis application based on a weighted multi-band CLS Algorithm

    QMax - stand-alone quantification analysis application based on a weighted multi-band CLS Algorithm

    What does QMax do? Allows the user to create an SPGAS Quantification set based on pre-collected or generated standard calibrated spectra. Quantification analysis based on the information provided by the quantification set. On screen display of ...

  • Synthetically generated calibration spectra for combustion analysis by FTIR

    Synthetically generated calibration spectra for combustion analysis by FTIR

    Challenges for FTIR Analysis in Combustion Applications (1/2) Combustion applications generate high amount of water vapor and CO2 Their absorption spectra strongly overlap with other species of real interest for the combustion analyses The ...

    Jorge E. Pérez, David Griffith

  • High-sensitivity, fast-response monitoring of PFC and abatement tool emissions by FTIR spectroscopy

    High-sensitivity, fast-response monitoring of PFC and abatement tool emissions by FTIR spectroscopy

    Semiconductor fab plants are faced with real-time monitoring and reduction of their PFC emissions to meet SEMI Environmental, Health and Safety (EHS) requirements. In some cases emissions are continuous, while in other cases they are intermittent or ...

    Jorge E. Pérez and Richard T. Meyer

  • Overcoming hydrogen-bonding in on-line spectroscopy of hydrofluoric acid

    Overcoming hydrogen-bonding in on-line spectroscopy of hydrofluoric acid

    Measure ppm Impurities On-line in HF Benefits Reduce - Grab Sampling, Exposure Improve - Turnaround, Precision, Process Control Challenges Materials Compatibility Unusual properties of HF Could not reproduce in laboratory Lab ...

    Paul G. Vahey, Jorge E. Perez