CLEAN SYSTEMS Technology (S) Pte Ltd. products

The CLEANSORB PRIMELINE series is a sophisticated range of dry bed exhaust gas abatement systems tailored for critical safety-oriented process applications, particularly in Metal Organic Chemical Vapor Deposition (MOCVD). These systems are designed to manage gas flows efficiently under stringent operating conditions. The PRIMELINE series includes models with varying configurations, such as the compact PS models featuring a supplementary column for continuous operations even when the primary absorber's capacity is exhausted. The larger PD model offers enhanced functionality with two full-size absorber columns and an additional backup column, ensuring uninterrupted operation. Maintenance is simplified as one column can continue to absorb gases with complete SEMI-S2-compliant safety while the other undergoes purging and refilling. CS CLEAN SOLUTIONS prioritizes environmental protection, integrating compliant safety controls within these systems to accommodate industry-specific requirements effectively.

The CLEANSORB FABLINE FX is an advanced exhaust gas purification system designed to offer reliable and efficient gas treatment solutions. It features a two-column model with a compact footprint that facilitates continuous operation without interruptions. The system's status and operating modes can be easily managed and monitored through an intuitive touchscreen interface. The FABLINE FX incorporates fully automated processes for gas purging and leak testing of its absorber column. Its chemisorber media ensure safety and performance, making it suitable for a variety of specific process applications, such as plasma etching, chemical vapor deposition (CVD), atomic layer deposition (ALD), ion implantation, and photovoltaic production. With its enhanced capabilities, the FABLINE FX upholds environmental protection as a core priority of CS CLEAN SOLUTIONS' product offerings.

CLEANSORB LABLINE is an exhaust gas treatment system designed for laboratory applications. It features a compact absorber column within a ventilated cabinet, offering passive chemisorption of hazardous gases at ambient temperatures. This capability facilitates laboratory workflows, eliminating the need for activation with each experiment. Its chemisorbent media is broadly selective, effectively targeting a wide array of gases and liquid precursors, including corrosive, toxic, and organometallic complexes. This versatility makes it particularly suited for research and development environments where diverse gas management is required, ensuring flexibility and safety in chemical handling.

CLEAN-PROTECT is a sophisticated hazardous gas disposal system designed to enhance safety protocols in chemical, pharmaceutical, and semiconductor industries. Operating as a specialty dry-bed absorber, it is engineered to neutralize toxic, corrosive, and flammable gases should a leak occur. Key gases include arsenic trihydride, boron trifluoride, bromine, chlorine, chlorine trifluoride, phosgene, fluorine, hydrochloric acid, hydrogen fluoride, hydrogen bromide, hydrogen sulfide, hydrogen selenide, hydrogen cyanide, ammonia, hydrazine, phosphine, and sulfur dioxide. CLEAN-PROTECT is integrated into air-extracted cabinets that contain gas supply from cylinders, ensuring robust containment and purification. Known for its efficacy, this system has been integral in safeguarding industrial environments globally, making it a reliable choice for facilities aiming to mitigate risks associated with hazardous gas exposure.