CollabraTech Solutions LLC products

A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, an extensive list of options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. CollabraTech also provides custom systems and solutions in circumstances where standard configurations are not sufficient.

The Dominus™ Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system. The VMB can include up to eight individual sticks distributing gas from a single supply line. An optional integrated vacuum generator and N2 purge provide a safe and effective means of purging the lines for service. The VMB system can be configured for a fully automatic system, a semi-automatic system or a fully manual system with ESO capability.

A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, an extensive list of options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. CollabraTech also provides custom systems and solutions in circumstances where standard configurations are not sufficient.

The Bulk Specialty Gas System (BSGS) is a state-of-the-art distribution system designed for safe, automatic delivery of bulk specialty gases. The PLC-based controller provides the operator with intuitive, easy-to-use touchscreen and on-screen prompts to simplify operator interaction with the machine. The graphical interface allows an operator to quickly determine the status of the tool with a glance at the screen. The panel buttons and on-screen menus offer easy access to any of the controller screens.

The Collabratech Blender is a closed-loop, control-based gas blending system combined with a built-in analyzer. It provides an accurate blend ratio at variable flow rates up to 250 slpm. These features, combined with intuitive PLC control software and a userfriendly touch-screen HMI, provide a safe, reliable and versatile gas mixing system.