DAIHEN Advanced Component, Inc products

2.45GHz/1kW~5kW Standard type of small size and high efficiency; High-performance type compatible with 2 level pulse. Features; We contribute to the generation of stable high density plasma by high precision output with good reproducibility. Wide lineup from 1kW to 5kW. Supports full support including matching device.

400kHz/500W~20kW High frequency power supply with pulse output function; Equipped with pulse function. Supports full support including matching device. High power models are also available to support high power process.

Standard type of small size and high efficiency; High-performance type compatible with 2 level pulse. Features; Large capacity lineup from 15kW to 30kW. Supports full support including matching device. Contribution to system cost reduction by the built-in variable frequency function.

High payload model for wafers up to 300mm Standard model which is available for high payload and extensive movement.

Edge grip type that does not touch the wafer backside and Compatible with quartz wafers.