Dynamic Structures and Materials, LLC (DSM) products

Piezo Stages

DSM - Model ZSA-1000C - Nanopositioning Piezoelectric

DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1000 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.

DSM - Model XSA-0200C-S-0718-150-SS - Nanopositioning Piezoelectric

DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.