EQUIcon Software GmbH Jena software

What is Electron Beam Lithography?An electron beam is used to generate patterns on the surface of wafers, masks or other flat substrates. This is an important process step in the manufacture of semiconductor chips and optical elements such as holograms or microscopic lenses.

ePLACE does not just fulfill the basic requirements of data preparation, but also provides the most modern technologies available which considerably increase the quality of the exposed patterns.

niceLAB is a SiLA-conform dynamic scheduling software for laboratory automation systems.