Forge Nano products

The Apollo system product line sets new benchmarks in atomic layer deposition productivity and cost effectiveness. Designed for high volume semiconductor wafer-based production, our Semi-S2 certified Apollo systems integrate the high productivity of SMFD-ALD with a revolutionary simple substrate handling. The result is a flexible, modular system that can be easily configured to our customers’ needs.

 PANDORA comes ready to run out of the box and ensures worry free, reliable operation for a variety of substrates. Optional GMP compliance adds the benefit of ALD for pharmaceutical applications.

We created Prometheus to enable atomic layer deposition research. Research and development for ALD has never been easier. Our tools put ALD at your fingertips. Forge Nano has installed Prometheus in laboratories and universities all over the world.

Forge Nano’s LITHOS Rotary Blender Reactor System combines industry expertise in rotary particle handling with a deep understanding of ALD, resulting in an easy-to-use, flexible, and reliable production system. LITHOS is designed to coat each particle with unrivaled thickness and conformity control, while minimizing or eliminating particle agglomeration. Our production machines are customizable and built to order, ensuring the optimal solution for each customer.