Gencoa Ltd. products

Gencoa`s third generation range of small circular magnetrons - available in target diameters of 2" to 5" - includes ±45° tilt adjustment, gas injection and a rear utility box for DC, DC-pulsed, RF and HIPIMS processes as standard.

Gencoa`s VTech range is available for target diameters of 2" to 6" and allow the magnetic properties over the target surface to be changed by simple external adjustment, which can be performed during the process or between deposition runs. Changes in the magnetic properties create different levels of strength and ion assistance to the coating process and allow rapid development of the thin film structures.

Gencoa’s large circular magnetrons are available in target sizes ranging from 6" to 16", and with a choice of magnetic and mechanical options to suit a range of applications. Every option is built to the high build standards that has become the trademark of Gencoa`s products, and a 10 year warranty is offered on the magnetic arrays of 6" target sizes or greater.

Gencoa planar rectangular magnetrons combine low ownership cost, robust design and highly-optimized magnetics to produce a reliable product delivering high performance. Our rectangular magnetrons are in use in almost every type of industrial coating application including semiconductor, architectural glass and display coating.

Gencoa double (or dual) magnetons combine all the process and design expertise to realise an integrated package that ensures `drop-in` optimum operation.

To serve markets requiring a simpler cathode design in as small a footprint as possible, Gencoa have introduced the `compact` range, offering cathodes which are significantly smaller than standard cathodes and have fewer mechanical features.

In some cases where it is not necessary or desirable to replace a complete magnetron cathode, it is possible for Gencoa to provide a replacement magnetic system to fit into the existing cathode body. This is a cost-effective method of upgrading the performance of the current system.

The GRS-S product is the most compact ‘drop-in’ rotatable magnetron design available on the market. The small size is a result of the Gencoa patented rotational drive system that minimizes the space required for the end-block assembly.

GRS-C is a cantilever-mounted rotatable magnetron by Gencoa which combines high load bearing and power delivery. The GRS-C is for horizontal drum type web coating machines with the end-block located outside the chamber side wall, and the target rotating within the chamber. The GRS-C compact nature and varying target diameters allows multiple sources to be located around the drum. Its unique design addresses the key points in reliable sputter process delivery with excellent results. The magnetic array angle can be set externally by a hand crank or a stepper motor. Despite its compact size, the GRS-C can be assembled with targets of up to 2.4m and is vibration-proof and robust. Its cooling and power capacity matches the largest cantilever-style rotatable magnetrons on the market.

Gencoa offer a range of plasma based pre-treatment and etching devices for a variety of applications.