Indeotec SA products

Products

Octopus - Thin Film Deposition Equipment

The Octopus II system is the latest product generation of the OCTOPUS equipment portfolio. The OCTOPUS II combines a couple of all-new, impressive and proprietary reactor and system design developments such as the IRFE technology for exceptional stable plasma conditions, the Mirror reactor concept for top and bottom deposition or the potential combination of the PECVD and PVD deposition mode in one system without any interruption of the process sequence. This set of innovations as well as the cluster platform concept provide an extraordinary high flexibility for many thin film applications, whether in an R&D environment or for pilot scale production purposes.

Products - Optical Diagnostic Tools

Indeotec - Laser Based Powder Detector

Measurement of Si powder particles in the PECVD exhaust. Time-resolved or steady-state measurements. Particularly useful for microcrystalline deposition processes. Designed for harsh environments. Compact & flange-mountable.

Indeotec - Infrared Laser-Based Silane Sensor

Direct absorption measurement of SiH4 in the infrared. Measurement in the exhaust or in the reactor of PECVD systems. Steady-state or time-resolved measurements. Determination of the SiH4 consumption efficiency, the SiH4 concentration in the plasma, and more. Compact & flange-mountable.

Indeotec - Plasma Emissions Monitoring System

Control of the plasma stability. Detection of powder formation. Post-data treatment for better interpretation of optical emission spectra. Compact & flange-mountable.

Indeotec - Ignition Detector

Optical detection of plasma ignition. High sensitivity to detect plasmas with low emission. Digital Output with adjustable threshold. Analog output of plasma intensity. Standard optic fiber connector for easy installation.