IUT Technologies GmbH applications

Airborne Molecular Contamination (AMC) is a general term for existing molecular contaminations in clean room environments. These compounds belong to very different groups with very different mechanisms of damage. AMC is a concern for any high technology manufacturing process, especially in the microelectronic industry and is getting more and more in the focus of interest. AM-contaminations may cause adverse effects on production tools and consequently increase costs for high-tech companies. These airborne contaminants cause expensive, yield-reducing and quality degrading problems such as film and trace corrosion, T-topping, bridging and unwanted doping of silicon.

Introduction: Ammonia (NH3) is a well-known, widely spread air pollutant, which is present almost everywhere in low ppm/ppb concentrations. So this chemical can be found in various processes, where gases are the basic media, such as steam crackers producing gaseous hydrocarbons for further production steps like polymerization. Gases like this are for example Ethylene, Propylene and even so called cracker gas, which is mostly a mixture of above mentioned gases as well as Water and Hydrogen. The gases of interest are separated and afterwards fed into a pipeline which is serving other chemical plants, producing Polyethylene f.i.

Introduction: Chlorodimethylether (CMME) and Bis Chloromethyl-ether (BCME) as well as Ethylene dichloride (EDC) and Methylene chloride (DCM) are well known as carcinogenic substances, like other chlorinated hydrocarbons. BCME is also very toxic. These particular chemicals are widely used in the world of chemical industry, especially in the production process for ion exchange resins. CMME in that case acts as a precursor for those resins while BCME is generated as an impurity which cannot be avoided.

Introduction: DMS (Dimethylsulfate) is a liquid compound with a high vapor pressure. It is a widely used basic chemical in the production of Agrochemicals, Cosmetics and Pharmaceutics. It is very toxic at ppb- concentrations already, but also carcinogenic and mutagenic. Furthermore by hydrolysis sulfuric acid is formed, so it is very corrosive also. Since there’s no warning effect in terms of irritation and/ or odor, dangerous amounts can be incorporated without realizing. The effects of intoxication, which are mainly chemical burn of the lungs, occur 6 to 12 hours after exposition. Thus, it is very dangerous.

Introduction: Ethylene oxide is a highly flammable and toxic gas which is the main precursor in the production of Ethylene glycol but also widely used in the medical sterilization. The Ethylene oxide sterilization is applied on medical and pharmaceutical products which cannot resist the high temperature ranges in usual steam sterilization processes. Certain products in the food industry are sterilized in the same way. Ethylene oxide gas penetrates the packaging as well as the product and kills all microorganisms which remain from manufacturing and packaging processes.

Introduction: Hydrazine is an inorganic compound consisting of just Hydrogen and Nitrogen. It is a clear and oily liquid with a high vapor pressure. Hydrazine is very reactive and very toxic, even at low ppb- levels already. It is carcinogenic, irritant at mucous membranes and damages lungs, the nervous system, kidneys and the liver. Hydrazine is used for various technical and chemical purposes such as a corrosion inhibitor in tubes and containers, in chemical production processes as reducing agent or Hydrogen source but also as fuel in rockets, space crafts or emergency backup generators and fuel cells.

Introduction: PFIB (Perfluorisobutlyene) is a gaseous compound from the group of Fluorinated Hydrocarbons. It is very toxic at ppb- concentrations already, inodorous, colorless, flavorless, heavier than air and very stable. The effects of intoxication can occur hours or even days after exposition. Thus, it is very dangerous. In specific processes in the chemical industry this compound is produced as un- wanted by product, such as the production of PTFE (Teflon), which cannot be avoided. Since there’s no actual purpose for PFIB, it is separated and devastated immediately. Furthermore it can be formed during the thermal decomposition of fluorinated Polymers.

Introduction: Phosgene is the common name for Carbonic Dichloride, a gaseous compound. It is very toxic at ppb- concentrations already. Phosgene is a very important precursor in the chemical industry for the production of e.g. polyurethanes, pharmaceutics colors, etc. and therefore widely used. Even though it is handled in hermetic closed systems only, several generators for Phosgene are in operation worldwide to at least avoid all risks caused by transportation also. The effects of intoxication can occur hours or even days after exposition. Thus, it is very dangerous. Due to its toxicity, Phosgene was used as one of the first chemical warfare agents (CWA) during world war one. So it is still present as residual in historic battle fields as a containment of old ammunition.