Neroxis products

The thermal conductivity gas sensor is manufactured on silicon with thin film deposition and silicon micro-machining techniques. This device determines gas concentrations of binary or ternary gas mixtures. The sensor structure consists of an integrated heater located on a thin electrical and thermal insulating membrane. Two thin film resistors are used for heating and measuring the temperature Tm of the membrane. Two reference resistors are integrated on the silicon beside the membrane area for the compensation of the ambient temperature changes. The four resistors are passivated to protect them from the effects of the gas and are electrically connected to a TO8 or TO5 base by gold wire bonding.

The MTCS2601 sensors consist of a micro-machined thermal conductivity sensor using four Ni-Pt resistors realized using MEMS technologies. The sensor is mounted in a miniature SMD package, available on tape and real. This MEMS TC sensor, combined with simple low power CMOS standard integrated circuits, is an excellent choice for size-critical leakage OEM detector or miniature vacuum gauge based on Pirani principle requiring ultra-low power consumption, long lifetime and no maintenance. Applications are primary pressure control in rough environment with power and size constraints, or detection in closed volume of gas leakage or moisture, or intrusion.

The MTCS2300 pressure gauge, using thermal conductance measurement according to Pirani principle, is a dedicated MEMS device mounted in a small TO8 or TO39 package. The sensor incorporates one large micro-machined low stress silicon nitride membrane with two thin film resistors for heating and two reference resistors for compensation on silicon bulk using Ni-Pt resistors MEMS technologies in a miniature package. This MEMS structure, combined with simple CMOS standard integrated circuits for current source and temperature analysis, is a suitable choice for size-critical vacuum OEM sensing solution requiring ultra-low power consumption with an excellent signal-to-noise ratio and resistance to corrosive gas.

The MTCS2601 sensors consist of a micro-machined thermal conductivity sensor using four Ni-Pt resistors realized using MEMS technologies. The sensor is mounted in a miniature SMD package, available on tape and real. This MEMS TC sensor, combined with simple low power CMOS standard integrated circuits, is an excellent choice for size-critical leakage OEM detector or miniature vacuum gauge based on Pirani principle requiring ultra-low power consumption, long lifetime and no maintenance. Applications are primary pressure control in rough environment with power and size constraints, or detection in closed volume of gas leakage or moisture, or intrusion.