NIPPON CONTROL SYSTEM Corporation software

PATACON PC-cluster is a software product for converting semiconductor mask design data to EB data for mask writers.
This system operates established PATACON software on a general-purpose Linux PC, and moreover operates several to some hundreds of Linux PC`s in the environment connected by a high-speed network. This allows processing largescale LSI mask data in a short time.

PATACON PC-Cluster For EPL is a software product running on multiple Linux PC`s for converting semiconductor mask design data to manufacturing data for EB steppers.This software has specialized functions for EPL, such as pattern placement for EPL mask structure, complementary division for stencil masks, stitching for connecting divided portions, proximity effect correction, generation of machine control data and mask inspection data, alignment mark insertion, and verification.

PATACON PC-cluster For LEEPL is a software product for converting semiconductor mask design data to manufacturing data for LEEPL stepper.Since LEEPL mask has different structure from that of photo mask, this software has specialized functions showed below to deal with data conversion for LEEPL.