Particle Measuring Systems (PMS) products

The NanoAir™ 10 is a purpose-built nanoparticle counter designed specifically for use in the most critical fab spaces. Enables detection of yield impacting particle excursions within Process Tools, Critical Cleanroom Areas, and Pressurized High Purity Gas delivery. The NanoAir™ 10 is a revolutionary new aerosol nanoparticle counter offering the sensitivity of a Condensation Particle Counter (CPC) with the ease of use of traditional cleanroom particle counters. The NanoAir is designed to monitor ultra-clean environments and provides 10 nm detection sensitivity at a sample flow rate of 2.8 LPM. The instrument is small enough for use in semiconductor process tools and Equipment Front-End Modules.

Ideal for cleanroom certification and monitoring. Be confident that your cleanroom meets certification standards. The Lasair® Pro clean room particle counter provides real-time information at your fingertip to detect subtle changes in air quality with accurate data that is easy to manage.

Reduce downtime and monitor your cleanroom with ease using palm-sized HandiLaz® Mini II. Comfortably measure particle presences in your clean room and respond quickly and accurately to leaks. Ticked bullet point Quickly diagnose sources on the spot. Ticked bullet point Sensitivity: 0.2 – 10 µm. Ticked bullet point Reduce running or replacement costs of monitors.

Increase productivity with data integrity assurance, process automation, simplicity of use, and data integration. Protect product quality with real-time monitoring and communication from an environmental monitoring system for your cleanroom. Ticked bullet point Ensure product quality. Ticked bullet point Safeguard compliance with industry regulations. Ticked bullet point Minimize downtime and maintenance.

Safeguard cleanroom integrity with advanced sequential monitoring. The AM II enables aerosol contamination checks at multiple locations using a single fixed airborne particle counter—ideal for trend analysis and cleanroom verification when continuous monitoring isn’t required. Compatible with Lasair and IsoAir instruments.

The Lasair® III 110 is a laser diode-based true 0.1 µm particle counter with 1.0 CFM flow rate. With a comprehensive set of features and unequaled accuracy, the Lasair III 110 oers reduced operating costs and the reliability and longevity to support its three-year laser warranty.

The Lasair III 110 delivers true 0.1 μm particle detection. It stands as a trusted safeguard for certifying the most critical environments—ISO Class 1 and 2 cleanrooms. Get the laser diode-based particle counter that best suits your needs as it comes in 2 models; a mobile model or an inline model.

A compact, user-friendly variable channel remote particle counter, designed for minimum downtime and multiple option flexibility. or use in ultra-high security cleanrooms, PMS has introduced an IsoAir® Pro-Plus model specifically designed without any radio frequency (RF) wireless communication capabilities. This specific product part SKU will not contain any hardware or firmware to enable Bluetooth, WiFi, or NFC capability and offers the same industry leading features of the PMS IsoAir® Pro-Plus Remote Particle Counter with the latest technologies to simplify cleanroom monitoring into a simple but powerful package that meets global regulations. Data from the instrument can be incorporated into either Particle Measuring Systems’ FacilityPro® Monitoring System or Facility Net so ware, with the option of third-party communications via Modbus TCP/IP or optional PMS TCP/IP protocols.

The IsoAir® Pro-E Remote Particle Counter uses the latest technologies to simplify cleanroom  monitoring into a simple but powerful package that meets global regulations. Data from the instrument can be incorporated into either Particle Measuring Systems’ FacilityPro® Monitoring System or Facility Net soware, with the option of third-party communications via Modbus TCP/IP or optional PMS TCP/IP protocols. Eective and flexible particle counter meeting global standards and leading particle monitoring system integration.

Sensitivity range: 0.3 - 5.0 µm - 2 Channels, Annex 1 solution. As part of a facility monitoring solution, the Airnet II and II_s Particle Sensors from Particle Measuring Systems are an EU GMP Annex 1 solution that meets the specifications of ISO 21501-4 to measure the size and number of particles suspended in the air for real-time monitoring of defect-causing particles.