PlasmaAir AG products

Green house effect and global warming are the critical issues in this new aera. These issues have some influence not only on the environment, but also on the economy and on the national safety. The main part of relevant gases, PFCs and SF₆, the GHGs (Green House Gases) defined in the Kyoto Protocol are generated from the semiconductor and optical electronics industries. In dry etching procedures these gases are accumulated and mixed with CVD gas for chamber cleaning processes. The special PFCs gases from these tools such as SF₆, CF₄, C₂F₆, C₃F₈, CHF₃ and NF₃ have to be treated before emission.

The steam plasma torch was developed as heat and radical source for a process of CFC decomposition. The process will be described in details. The process gas is mixed into a steam plasma jet. Through the high temperatures and the available radical the CFC will be cracked and react with the oxygen and the hydrogen coming from the water plasma to CO2, HCl and HF. The reaction takes place in a high temperature reactor. The hydrofluoric acid can either be neutralized or recovered. The exhaust gases from the high temperature reactors could be fed to an exhaust gas scrubber.

PlasmaAir AG has a long expertise in developing plasma systems for different application. The main product is a water steam plasma torch with focus on a long lifetime of the eletrodes.

The absorption scrubbers are used to reduce gaseous contaminants. Absorbable contaminants are usually inorganic compounds, such as: Ammoniac NH3; Hydrogen Sulphide H2S; Hydrogen Chloride HCl; Sulphur dioxide SO2 etc; Amines.