Trillium US products

The Edwards QDP Series Dry Pumps are an excellent choice for primary pumping requirements in a wide range of applications. Their low capital and repair cost, ease of operation and interface ability with a wide range of process tools make them the preferred choice for upgrading rotary vane pumping systems. Following the 1st generation of air cooled Edwards CDP and DP series dry pumps, the QDP40 was launched featuring a more quiet water cooled motor and built in functionality for integration to a parent system. This 2nd generation of dry pumps from Edwards became the work horse of the semiconductor Industry in the mid 90’s, and many thousands are still in use today.

The Edwards QDP Series Dry Pumps are an excellent choice for primary pumping requirements in a wide range of applications. Their low capital and repair cost, ease of operation and interface ability with a wide range of process tools make them the preferred choice for upgrading rotary vane pumping systems. Following the 1st generation of air cooled Edwards CDP and DP series dry pumps, the QDP40/QMB250 was launched featuring quieter water cooled motors and built in functionality for integration to a parent system. This 2nd generation of dry pumps from Edwards became the work horse of the semiconductor Industry in the mid 90’s, and many thousands are still in use today.

INDUSTRY-STANDARD CRYOPUMP FOR RESEARCH AND PRODUCTION APPLICATIONS. Trillium’s Cryo-Plex 8 cryopump is a high quality cryogenic vacuum pump with proven two-stage cold head design (Gifford/McMahon principle) that captures water vapor and gasses at high pumping speeds, resulting in oil-free high and ultra-high vacuums. Cryo-Plex 8 can be configured to support a wide range of research and production applications and is an integral component of Trillium’s’ cryogenic high vacuum solutions.

INDUSTRY-STANDARD CRYOPUMP FOR RESEARCH AND PRODUCTION APPLICATIONS. Cryo-Plex 8LP has a body/flange orientation mounted 90 degrees from the centerline of the pump, shortening the profile height over 66% from our standard Cryo-Plex 8 cryopump design.

The Neslab HX75 has long been the workhorse of many industries, including Semiconductor fabrication where it is quite popular. Available with an air or water cooled condenser and single phase voltage, the HX75 was offered with a number of different temperature controllers ranging from basic analog to more sophisticated RS232 input/outputs. In 2009 Trillium acquired the chiller and heat exchanger service business from Air Products, who had specialized in Neslab chiller repair. Trillium provides End Users worldwide support, repair service and spare parts, as well as Refurbished Neslab HX75s. The following specifications are provided for both the HX 75 and HX150 for comparison purposes.