AMC Monitoring - Brochure

Challenge: Airborne Molecular Contamination (AMC) is a general term for existing molecular contaminations in clean room environments. These compounds belong to very different groups with very different mechanisms of damage. AMC is a concern for any high technology manufacturing process, especially in the microelectronic industry and is getting more and more in the focus of interest. AM contaminations may cause adverse effects on production tools and consequently increase costs for high-tech companies. These airborne contaminants cause expensive, yield-reducing and quality degrading problems such as film and trace corrosion, T-topping, bridging and unwanted doping of silicon.