AmmoNOx Line Brochure

The design of the AmmoNOx line is consequent orientated on the requests of MOCVD processes.
AmmoNOx tools are working on a improved oxidation technology, optimized in energy consumption. In combination with the integrated MetSorb dry-bed-scrubber for absorption of metal-organic-compounds, the AmmoNOx tool is a All-in-One solution. The AmmoNOx abatement systems are completely electrical driven. This guarantees uptimes from 98% and low running costs. All components of the AmmoNOx line where well selected, to take care of long life time and to secure costumer investment.