AST - Ultra-Fast Automated Inspection and Metrology System - Brochure

AST offers flexible solutions for inspection, defect detection, and metrology at wafer, die, and/or film frame level.  Imaging optics are configurable across a wide spectrum including Visible, NIR, SWIR, & UV wavelengths.  Visible imaging options include Brightfield, Darkfield, Differential Interference Contrast (DIC), Polarized, plus other imaging techniques.  Coaxial, oblique, and backlight illumination options can be integrated for optimum image quality.  AST can also integrate other sensor technology such as Spectrophotometers, Ellipsometers, Profilometers, etc. to combine multiple tool metrology tasks into a single system, reducing operation and tool counts and handling requirements.