Beneq - Model P1500 - Batch Production Equipment - Brochure

The world’s largest ALD system for your biggest substrates. The Beneq P1500, our biggest ALD system, is built specifically to coat sizeable sheets and complex parts. It is also made to deliver increased throughput for batches of smaller components. Our customers use the P1500 for optical coatings on large diameter substrates, anticorrosive coatings of semiconductor equipment parts, and various applications where ALD is used on glass or metal sheets.