Beneq - Model P400A - Batch Production Equipment Brochure

ALD system that perfectly balances uniformity and throughput. The Beneq P400A is built specifically to coat different types of substrates in an optimized batch size – large enough to offer significant capacity, but small enough to maintain excellent uniformity within batches and short cycle times. Our customers use the P400A for optical coatings and applications where ALD is used on glass or metal sheets.