Calibration Wafer Standards - Patterned PSL Depositions Brochure

The Patterned PSL Deposition Standard is a bare wafer deposited with polystyrene latex (PSL) spheres in spot, arc, or ring patterns on the frontside surface. The spheres have a very narrow size distribution and are deposited in a welldefined pattern for each PSL sphere size. A single wafer deposited with multiple PSL sizes can be used to generate a calibration curve for a scanning surface inspection system (SSIS) tool used for measuring defects on wafer surfaces.

Patterned PSL Deposition Standards are available with PSL sphere sizes ranging from 40nm to 3.0µm, which have been selected for calibration of KLA-Tencor Surfscan SP1, SP2, and 6000-series SSIS tools. Other PSL sizes, as small as 20nm, are available upon request.