Carten MD Series Ultra-High Purity Diaphragm Valve Brochure

Ultra-High Purity Mini-diaphragm ValvesMD seriesMD Series Typical Valve DimensionsMDq 250-01/-02/-08/-09-LV oPTionaL Lock oUT/Tag oUT DeViceMDa 250-05-LV-no (-06) enD connecTion TyPeMD 250-03-LV MDa 250-04-LV-nc(-07) enD connecTion TyPe TyPicaL boTToM MoUnTingMD Series Technical DataMaterial OF COnstruCtiOnWetted areas 316l stainless steel, nickel alloy, PCtFenon-Wetted areas 316l stainless steelMaXiMuM OPeratinG Pressure MD/MDQ 250MDa 250Vacuum to 375 psig (25.8 bar)Vacuum to 250 psig (0-17.2 bar)MaXiMuM OPeratinG teMPerature MD/MDQ 250MDa 250180º F (82º C)180º F (82º C)FlOW COeFFiCent (Cv),CYCle liFe & aCtuatOr PressureModel Cv Value Cycle life act. Press.MD 250MDQ 250MDa 2500.3 (0.33 with FsM fittings)>20,000@150 psi>20,000@150 psi>10,000,000nana50-72 psiHeliuM leaK testinboardacross the seatOutboard Pressure test1 x 10-11 Pa.m3/s (1 x 10-10 atm.cc (He) /s)1 x 10-10 Pa.m3/s (1 x 10-9 atm.cc (He) /s)1 x 10-7 Pa.m3/s (1 x 10-6 atm.cc (He) /s)Cleanlinessassembled and tested in Class 10 cleanroom. Purged and final packaged in Class 1 cleanroom. Double-bag packaging (2 mil nylon inner bag, 6 mil polyethylene outer bag) with ultra-High Purity n2 gas environment.stanDarD FinisH electropolished to 10 ra Max (0.25 ra µm) on all wetted surfacesOPtiOnssurface finish-5 ra optionaltesting: Particle, Moisture, tHC, O2, seM, esCa, and aesPurge fitting type and locationHandwheel colorspecifications are subject to change without notice. reV 2010Carten Controls, A division of Fujikin 604 W. Johnson avenue, Cheshire, Ct 06410 phone: 203-699-2100 | fax: 203-699-2179www.cartenus.comnOte 1: all tolerances are ±0.06 in. (±1.52mm) unless otherwise stated. nOte 2: Dimensional drawings shown are for reference only. Please contact Carten® for customer drawings. Code a B C D-01 1.75 .345 .250 .035-02 1.61 .275 .250 .035-08 1.75 .345 .375 .035-09 2.26 .600 .500 .049MDH Series Typical Valve Dimensions(continued)nOte 1: all tolerances are ±0.06 in. (±1.52mm) unless otherwise stated. nOte 2: Dimensional drawings shown are for reference only. Please contact Carten® for customer drawings. MDH 250-06-LV MDH-250-07-LVOpen/Close IndicatorEasy Grip HandleNickel Alloy DiaphragmPCTFE Seat InsertMD 250oUTLeT316L Stainless Steel Barstock BodyinLeTMD construction MaterialsMD series MD seriesMD Series Product Featuresl Diaphragm Design for ultra-High Purity service and High Cycle lifel Highest Cvl ultra-High Purity stainless steel/PCtFe Gas Constructionl Minimal Dead space for Faster Dry Down and reduced Purge timesl industry leading Design in ultra-High Purity Gas Containmentl 1/4” standard Metal Face seal Fittings or Butt Weld end Connectionsl Field retrofit Manual or air actuatedl Visible Position indication of Valvel assembled and tested in Class 10 Cleanrooml Purged and Final Packaged in Class 1 Cleanroom. Double-Bag Packaging with ultra-High Purity n2 Gas environmentl Manual or air actuated availablel electropolished Wetted surfaces to 10 ra Max(Optional surface finishes available)these MD series valves are designed for high performance gas- and chemical-distribution systems where purity, combined with the lowest overall operating costs, are required. applications for this valve include:• Gas cabinets, valve manifold boxes, and gas isolation boxes• Point-of-connection gas sticks• Processing tools• Bubbler systems including canister isolation valves• Bulk gas system purge valveMDH 250*see corresponding Code Chart for tube sizes, purge types and locations. *see corresponding Code Chart for tube sizes, purge types and locations.Open/Close IndicatorEasy Grip HandleNickel Alloy DiaphragmPCTFE Seat Insert316L Stainless Steel Barstock BodyMDH construction MaterialsMDH Series Product Featuresl Diaphragm Design for uHP service and High Cycle lifel High Pressure up to 3000psil Highest Cvl Minimal Dead space for Faster Dry Down and reduced Purge timesl 1/4" standard Metal Face seal Fittings or Butt Weld end Connectionsl Visible Open/Close Position indication of Valvel assembled and tested in Class 10 Cleanrooml Purges and Final Packages in Class 1 Cleanrooml electropolished Wetted surfaces to 10 ra Max(Optional surface finishes available)the MDH series Valves are designed for high performance gas and chemical distribution systems where purity combined with the lowest overall operating costs, make this valve an excellent consideration for:• Gas cabinets, valve manifold boxes, gas isolation boxes• Point of connection gas sticks• Processing tools• Bubbler systems including canister isolation valves• Bulk gas system purge valve316L Stainless Steel Tube Ends*316L Stainless Steel Tube Ends*MDH Series Technical DataCOnstruCtiOn MaterialWetted areas 316l stainless steel, nickel alloy, PCtFenon-Wetted areas 316l stainless steelOPeratinG Pressure ranGe Vacuum to 3000 psi. (207 Bar)MaXiMuM teMPerature 180º F (82º C)FlOW COeFFiCent (Cv) 0.3 (0.33 with FsM fittings)HeliuM leaK testinboardacross the seatOutboard Pressure test1 x 10-11 Pa.m3/s (1 x 10-10 atm.cc (He) /s)1 x 10-10 Pa.m3/s (1 x 10-9 atm.cc (He) /s)1 x 10-7 Pa.m3/s (1 x 10-6 atm.cc (He) /s)Cleanlinessassembled and tested in Class 10 cleanroom. Purged and final packaged in Class 1 cleanroom. Double-bag packaging (2 mil nylon inner bag, 6 mil polyethylene outer bag) with ultra-High Purity n2 gas environment. stanDarD FinisH electropolished to 10 ra Max (0.25 ra µm) on all wetted surfacesOPtiOnssurface finish-5 ra optional testing: Particle, Moisture, tHC, O2, seM, esCa, and augerPurge fitting type and locationHandwheel colorspecifications are subject to change without notice.MDH Series Typical Valve DimensionsMDH 250-01/02/08/09-LVCode a B C D-01 1.75 .345 .250 .035-02 1.61 .275 .250 .035-08 1.75 .345 .375 .035-09 2.26 .600 .500 .049TyPicaL boTToM MoUnTingMDH 250-05-LV MDH 250-03-LV MDH 250-04-LVUltra-High Purity Mini-diaphragm ValvesMD seriesMD Series Typical Valve DimensionsMDq 250-01/-02/-08/-09-LV oPTionaL Lock oUT/Tag oUT DeViceMDa 250-05-LV-no (-06) enD connecTion TyPeMD 250-03-LV MDa 250-04-LV-nc(-07) enD connecTion TyPe TyPicaL boTToM MoUnTingMD Series Technical DataMaterial OF COnstruCtiOnWetted areas 316l stainless steel, nickel alloy, PCtFenon-Wetted areas 316l stainless steelMaXiMuM OPeratinG Pressure MD/MDQ 250MDa 250Vacuum to 375 psig (25.8 bar)Vacuum to 250 psig (0-17.2 bar)MaXiMuM OPeratinG teMPerature MD/MDQ 250MDa 250180º F (82º C)180º F (82º C)FlOW COeFFiCent (Cv),CYCle liFe & aCtuatOr PressureModel Cv Value Cycle life act. Press.MD 250MDQ 250MDa 2500.3 (0.33 with FsM fittings)>20,000@150 psi>20,000@150 psi>10,000,000nana50-72 psiHeliuM leaK testinboardacross the seatOutboard Pressure test1 x 10-11 Pa.m3/s (1 x 10-10 atm.cc (He) /s)1 x 10-10 Pa.m3/s (1 x 10-9 atm.cc (He) /s)1 x 10-7 Pa.m3/s (1 x 10-6 atm.cc (He) /s)Cleanlinessassembled and tested in Class 10 cleanroom. Purged and final packaged in Class 1 cleanroom. Double-bag packaging (2 mil nylon inner bag, 6 mil polyethylene outer bag) with ultra-High Purity n2 gas environment.stanDarD FinisH electropolished to 10 ra Max (0.25 ra µm) on all wetted surfacesOPtiOnssurface finish-5 ra optionaltesting: Particle, Moisture, tHC, O2, seM, esCa, and aesPurge fitting type and locationHandwheel colorspecifications are subject to change without notice. reV 2010Carten Controls, A division of Fujikin 604 W. Johnson avenue, Cheshire, Ct 06410 phone: 203-699-2100 | fax: 203-699-2179www.cartenus.comnOte 1: all tolerances are ±0.06 in. (±1.52mm) unless otherwise stated. nOte 2: Dimensional drawings shown are for reference only. Please contact Carten® for customer drawings. Code a B C D-01 1.75 .345 .250 .035-02 1.61 .275 .250 .035-08 1.75 .345 .375 .035-09 2.26 .600 .500 .049MDH Series Typical Valve Dimensions(continued)nOte 1: all tolerances are ±0.06 in. (±1.52mm) unless otherwise stated. nOte 2: Dimensional drawings shown are for reference only. Please contact Carten® for customer drawings. MDH 250-06-LV MDH-250-07-LVOpen/Close IndicatorEasy Grip HandleNickel Alloy DiaphragmPCTFE Seat InsertMD 250oUTLeT316L Stainless Steel Barstock BodyinLeTMD construction MaterialsMD series MD seriesMD Series Product Featuresl Diaphragm Design for ultra-High Purity service and High Cycle lifel Highest Cvl ultra-High Purity stainless steel/PCtFe Gas Constructionl Minimal Dead space for Faster Dry Down and reduced Purge timesl industry leading Design in ultra-High Purity Gas Containmentl 1/4” standard Metal Face seal Fittings or Butt Weld end Connectionsl Field retrofit Manual or air actuatedl Visible Position indication of Valvel assembled and tested in Class 10 Cleanrooml Purged and Final Packaged in Class 1 Cleanroom. Double-Bag Packaging with ultra-High Purity n2 Gas environmentl Manual or air actuated availablel electropolished Wetted surfaces to 10 ra Max(Optional surface finishes available)these MD series valves are designed for high performance gas- and chemical-distribution systems where purity, combined with the lowest overall operating costs, are required. applications for this valve include:• Gas cabinets, valve manifold boxes, and gas isolation boxes• Point-of-connection gas sticks• Processing tools• Bubbler systems including canister isolation valves• Bulk gas system purge valveMDH 250*see corresponding Code Chart for tube sizes, purge types and locations. *see corresponding Code Chart for tube sizes, purge types and locations.Open/Close IndicatorEasy Grip HandleNickel Alloy DiaphragmPCTFE Seat Insert316L Stainless Steel Barstock BodyMDH construction MaterialsMDH Series Product Featuresl Diaphragm Design for uHP service and High Cycle lifel High Pressure up to 3000psil Highest Cvl Minimal Dead space for Faster Dry Down and reduced Purge timesl 1/4" standard Metal Face seal Fittings or Butt Weld end Connectionsl Visible Open/Close Position indication of Valvel assembled and tested in Class 10 Cleanrooml Purges and Final Packages in Class 1 Cleanrooml electropolished Wetted surfaces to 10 ra Max(Optional surface finishes available)the MDH series Valves are designed for high performance gas and chemical distribution systems where purity combined with the lowest overall operating costs, make this valve an excellent consideration for:• Gas cabinets, valve manifold boxes, gas isolation boxes• Point of connection gas sticks• Processing tools• Bubbler systems including canister isolation valves• Bulk gas system purge valve316L Stainless Steel Tube Ends*316L Stainless Steel Tube Ends*MDH Series Technical DataCOnstruCtiOn MaterialWetted areas 316l stainless steel, nickel alloy, PCtFenon-Wetted areas 316l stainless steelOPeratinG Pressure ranGe Vacuum to 3000 psi. (207 Bar)MaXiMuM teMPerature 180º F (82º C)FlOW COeFFiCent (Cv) 0.3 (0.33 with FsM fittings)HeliuM leaK testinboardacross the seatOutboard Pressure test1 x 10-11 Pa.m3/s (1 x 10-10 atm.cc (He) /s)1 x 10-10 Pa.m3/s (1 x 10-9 atm.cc (He) /s)1 x 10-7 Pa.m3/s (1 x 10-6 atm.cc (He) /s)Cleanlinessassembled and tested in Class 10 cleanroom. Purged and final packaged in Class 1 cleanroom. Double-bag packaging (2 mil nylon inner bag, 6 mil polyethylene outer bag) with ultra-High Purity n2 gas environment. stanDarD FinisH electropolished to 10 ra Max (0.25 ra µm) on all wetted surfacesOPtiOnssurface finish-5 ra optional testing: Particle, Moisture, tHC, O2, seM, esCa, and augerPurge fitting type and locationHandwheel colorspecifications are subject to change without notice.MDH Series Typical Valve DimensionsMDH 250-01/02/08/09-LVCode a B C D-01 1.75 .345 .250 .035-02 1.61 .275 .250 .035-08 1.75 .345 .375 .035-09 2.26 .600 .500 .049TyPicaL boTToM MoUnTingMDH 250-05-LV MDH 250-03-LV MDH 250-04-LVOpen/Close IndicatorEasy Grip HandleNickel Alloy DiaphragmPCTFE Seat InsertMD 250oUTLeT316L Stainless Steel Barstock BodyinLeTMD construction MaterialsMD series MD seriesMD Series Product Featuresl Diaphragm Design for ultra-High Purity service and High Cycle lifel Highest Cvl ultra-High Purity stainless steel/PCtFe Gas Constructionl Minimal Dead space for Faster Dry Down and reduced Purge timesl industry leading Design in ultra-High Purity Gas Containmentl 1/4” standard Metal Face seal Fittings or Butt Weld end Connectionsl Field retrofit Manual or air actuatedl Visible Position indication of Valvel assembled and tested in Class 10 Cleanrooml Purged and Final Packaged in Class 1 Cleanroom. Double-Bag Packaging with ultra-High Purity n2 Gas environmentl Manual or air actuated availablel electropolished Wetted surfaces to 10 ra Max(Optional surface finishes available)these MD series valves are designed for high performance gas- and chemical-distribution systems where purity, combined with the lowest overall operating costs, are required. applications for this valve include:• Gas cabinets, valve manifold boxes, and gas isolation boxes• Point-of-connection gas sticks• Processing tools• Bubbler systems including canister isolation valves• Bulk gas system purge valveMDH 250*see corresponding Code Chart for tube sizes, purge types and locations. *see corresponding Code Chart for tube sizes, purge types and locations.Open/Close IndicatorEasy Grip HandleNickel Alloy DiaphragmPCTFE Seat Insert316L Stainless Steel Barstock BodyMDH construction MaterialsMDH Series Product Featuresl Diaphragm Design for uHP service and High Cycle lifel High Pressure up to 3000psil Highest Cvl Minimal Dead space for Faster Dry Down and reduced Purge timesl 1/4" standard Metal Face seal Fittings or Butt Weld end Connectionsl Visible Open/Close Position indication of Valvel assembled and tested in Class 10 Cleanrooml Purges and Final Packages in Class 1 Cleanrooml electropolished Wetted surfaces to 10 ra Max(Optional surface finishes available)the MDH series Valves are designed for high performance gas and chemical distribution systems where purity combined with the lowest overall operating costs, make this valve an excellent consideration for:• Gas cabinets, valve manifold boxes, gas isolation boxes• Point of connection gas sticks• Processing tools• Bubbler systems including canister isolation valves• Bulk gas system purge valve316L Stainless Steel Tube Ends*316L Stainless Steel Tube Ends*MDH Series Technical DataCOnstruCtiOn MaterialWetted areas 316l stainless steel, nickel alloy, PCtFenon-Wetted areas 316l stainless steelOPeratinG Pressure ranGe Vacuum to 3000 psi. (207 Bar)MaXiMuM teMPerature 180º F (82º C)FlOW COeFFiCent (Cv) 0.3 (0.33 with FsM fittings)HeliuM leaK testinboardacross the seatOutboard Pressure test1 x 10-11 Pa.m3/s (1 x 10-10 atm.cc (He) /s)1 x 10-10 Pa.m3/s (1 x 10-9 atm.cc (He) /s)1 x 10-7 Pa.m3/s (1 x 10-6 atm.cc (He) /s)Cleanlinessassembled and tested in Class 10 cleanroom. Purged and final packaged in Class 1 cleanroom. Double-bag packaging (2 mil nylon inner bag, 6 mil polyethylene outer bag) with ultra-High Purity n2 gas environment. stanDarD FinisH electropolished to 10 ra Max (0.25 ra µm) on all wetted surfacesOPtiOnssurface finish-5 ra optional testing: Particle, Moisture, tHC, O2, seM, esCa, and augerPurge fitting type and locationHandwheel colorspecifications are subject to change without notice.MDH Series Typical Valve DimensionsMDH 250-01/02/08/09-LVCode a B C D-01 1.75 .345 .250 .035-02 1.61 .275 .250 .035-08 1.75 .345 .375 .035-09 2.26 .600 .500 .049TyPicaL boTToM MoUnTingMDH 250-05-LV MDH 250-03-LV MDH 250-04-LVUltra-High Purity Mini-diaphragm ValvesMD seriesMD Series Typical Valve DimensionsMDq 250-01/-02/-08/-09-LV oPTionaL Lock oUT/Tag oUT DeViceMDa 250-05-LV-no (-06) enD connecTion TyPeMD 250-03-LV MDa 250-04-LV-nc(-07) enD connecTion TyPe TyPicaL boTToM MoUnTingMD Series Technical DataMaterial OF COnstruCtiOnWetted areas 316l stainless steel, nickel alloy, PCtFenon-Wetted areas 316l stainless steelMaXiMuM OPeratinG Pressure MD/MDQ 250MDa 250Vacuum to 375 psig (25.8 bar)Vacuum to 250 psig (0-17.2 bar)MaXiMuM OPeratinG teMPerature MD/MDQ 250MDa 250180º F (82º C)180º F (82º C)FlOW COeFFiCent (Cv),CYCle liFe & aCtuatOr PressureModel Cv Value Cycle life act. Press.MD 250MDQ 250MDa 2500.3 (0.33 with FsM fittings)>20,000@150 psi>20,000@150 psi>10,000,000nana50-72 psiHeliuM leaK testinboardacross the seatOutboard Pressure test1 x 10-11 Pa.m3/s (1 x 10-10 atm.cc (He) /s)1 x 10-10 Pa.m3/s (1 x 10-9 atm.cc (He) /s)1 x 10-7 Pa.m3/s (1 x 10-6 atm.cc (He) /s)Cleanlinessassembled and tested in Class 10 cleanroom. Purged and final packaged in Class 1 cleanroom. Double-bag packaging (2 mil nylon inner bag, 6 mil polyethylene outer bag) with ultra-High Purity n2 gas environment.stanDarD FinisH electropolished to 10 ra Max (0.25 ra µm) on all wetted surfacesOPtiOnssurface finish-5 ra optionaltesting: Particle, Moisture, tHC, O2, seM, esCa, and aesPurge fitting type and locationHandwheel colorspecifications are subject to change without notice. reV 2010Carten Controls, A division of Fujikin 604 W. Johnson avenue, Cheshire, Ct 06410 phone: 203-699-2100 | fax: 203-699-2179www.cartenus.comnOte 1: all tolerances are ±0.06 in. (±1.52mm) unless otherwise stated. nOte 2: Dimensional drawings shown are for reference only. Please contact Carten® for customer drawings. Code a B C D-01 1.75 .345 .250 .035-02 1.61 .275 .250 .035-08 1.75 .345 .375 .035-09 2.26 .600 .500 .049MDH Series Typical Valve Dimensions(continued)nOte 1: all tolerances are ±0.06 in. (±1.52mm) unless otherwise stated. nOte 2: Dimensional drawings shown are for reference only. Please contact Carten® for customer drawings. MDH 250-06-LV MDH-250-07-LV