Chambergard - Model FV50D XL - Gas Diffuser Brochure

Chambergard FV50 Gas Diffusers rapidly reduce particles and vent times in load lock and transfer chambers and feature an efficient and robust Ni disk membrane. Rated at 1,000,000 cycles. Patented, sintered nickel technology in a compact diffuser for all-application performance. Removes particles greater than 0.003 µm from incoming gas minimizes wafer defects.