Closed Coupled Showerhead?? CCS Systems for R&D - Brochure

Flexible MOCVD system for R&D and small scale production. Key Benefits: Versatile R&D platform with integrated glovebox, True scaling from R&D to mass production, Inherently uniform and reproducible growth for all material systems, High flexibility in process window for excellent material quality and uniformity, Ideal for small R&D budgets: lowest running cost, Low gas flows and high precursor efficiency, Easy and low cost maintenance