CMP Profile - II - Filter Capsules Brochure

CMP Filtration Capsules Data Sheet A33aCMP Profile® II Filter CapsulesDescriptionCMP Profile II Filter Capsules aredesigned for the filtration of both oxideand metal slurries at chemical mechani-cal polishing (CMP) tools.• Compact completely disposablecapsule consists of an all polypro-pylene Profile II filter element in a heat-welded polypropylene shell.• Profile II filter elements are techno-logically advanced depth filters withabsolute removal ratings. The uniqueconstruction with built-in prefiltrationassures long service life andconsistent high level performance withneither breakthrough of contaminantsnor shedding of filter medium.• The availability of absolute filterremoval ratings, from 1 µm to 70 µmassures selection of the capsules tomatch the range of CMP slurries.• CMP capsules retain aggregatedmaterial and foreign matter and havenot been shown to alter slurrypolishing characteristics.SpecificationsMaterials• Medium: Continuous polypropylene filament• Core: Polypropylene• Shell: PolypropyleneRemoval Ratings• 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 40 µm, and 70 µm(Profile filter removal ratings can be 5 – 10 times finer than traditional ratings for depth filters.) Operating Conditions1• Maximum Pressure:100 psid/7 bar @ 100°F / 40°C• Maximum Differential Pressure:60 psid/4 bar @ 77°F / 25°C30 psid/2 bar @ 140°F / 60°C• Maximum Temperature:140°F / 60°C @ 60 psi / 4 barConnections• Inlet/Outlet: 1/4" NPT1 Recommendations are based on long term tests in water. Compatibility with other fluids must bechecked before use.25 Harbor Park DrivePort Washington, New York 110501.800.360.7255 toll free (only in US)1.516.484.3600 phone1.516.625.3610 faxmicroelectronics@pall.comPall Corporation has offices and plants throughout the world.Visit us on the Web at www.pall.com/microA33a© Copyright 2008, 2004, Pall Corporation. Pall and are trademarks of Pall Corporation. ® Indicates a Palltrademark registered in the USA. is a service mark of Pall Corporation. CMP Capsule Pressure Drop20 25 3020151055253020151020001600120080040000 CleanPressureDrop(mbar)CleanPressureDrop(psid)Liquid Flow Rate (L/min)Water / 1cP FluidCMPY1NN04CMPY050N04CMPY1PN042 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.2.7"68 mm6.2"157 mmDimensionsPart Numbers / Ordering InformationPart Number Removal Rating (µm) ConnectionCMPY1NN04 1 1/4" NPTCMPY1PN04 3 1/4" NPTCMPY050N04 5 1/4" NPTCMPY100N04 10 1/4" NPTCMPY200N04 20 1/4" NPTCMPY400N04 40 1/4" NPTCMPY700N04 70 1/4" NPT0 25 302015105210121486490060030000 CleanPressureDrop(mbar)CleanPressureDrop(psid)Liquid Flow Rate (L/min)Water / 1cP FluidCMPY700N04CMPY400N04CMPY100N04CMPY200N04Unit conversion: 1 bar = 100 kilopascals