Determination of ultratrace elements in semiconductor grade Isopropyl Alcohol using the Thermo Scientific iCAP TQs ICP-MS - Application Note

Isopropyl alcohol (IPA) is used to clean wafers during production in the semiconductor industry. As IPA comes into direct contact with wafer surfaces, it must be controlled for its trace metal purity. Because of its high elemental sensitivity, ICP-MS is widely used in quality control analyses of materials in the semiconductor industry. An ICP-MS technique for the direct analysis of IPA would provide a useful control for ultratrace (ng·L-1) levels of analytes in IPA and avoid any contamination caused by sample preparation.