Digital Electronic Pressure Meters- Controllers EL-PRESS Series

> IntroductionBronkhorst High-Tech B.V. the European market leader in thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers, has 30 years experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments, Bronkhorst High-Tech offers innovative solutions for many different applications in many different markets. The instruments are made to customers’ specification, in various styles, suitable for use in laboratory, industrial and hazardous areas, in such diverse applications as semiconductor and analytical installations, to name but two.> EL-PRESS series Pressure Meters and ControllersThe EL-PRESS series electronic Pressure Meters and Controllers have a well-proven compact thru-flow design and are available in pressure ranges from 2…100 mbar up to 8…400 bar, both in absolute and relative (gauge) pressure. A differential pressure transducer can also be supplied in the ranges of 2…100 mbar up to 0,3…15 bar. The pressure controller performs with high accuracy and repeatability and should be specified for forward or backward pressure control.> State of the art digital designTodays EL-PRESS series are equipped with a diaphragm type piezoresistive pressure sensor and a digital pc-board as standard and offer high accuracy, stability and reliability. The basic digital pc-board contains all of the general functions needed for measure-ment and control. In addition to the standard RS232 output, the instruments also offer analog I/O. As an option, an integrated inter-face board provides DeviceNetTM, PROFIBUS-DP®, Modbus-RTU or FLOW-BUS protocols. The latter is a fieldbus based RS485, specifi-cally designed by Bronkhorst High-Tech for their mass flow and pressure metering and control solutions, and with which the company already has over ten years of experience with digital communication.> Pressure Controllers for every applicationThe control valve can be furnished as integral part of an EL-PRESS Pressure Controller (EPC), or as a separate component. It is a proportional, electromagnetic control valve with extremely fast and smooth control characteristics. With reference to the specific field of application there are different series of control valves. There is a standard direct acting valve for common applications, a pilot operated valve for high flow rates, the so-called Vary-P valve that can cope with up to 400 bar ?P and a bellows valve for applications with very low differential pressure.> EL-PRESS featuresu High accuracy and repeatabilityu High pressure capability up to 400 baru Stable control even at varying process volumesu Optional metal sealed and downported constructionsu Analog I/O signals: 0…5(10) V / 0(4)…20 mA u Digital communication: RS232, DeviceNetTM, PROFIBUS-DP®, Modbus-RTU or FLOW-BUS> Fields of applicationu Semiconductor processingu Gas and liquid chromatographyu Vapour pressure control in MOCVD processesu Protective gas pressure control in extrusion moulding processesu Autoclave / reactor pressure controlEL-PRESSDigital Electronic Pressure Meters and ControllersPressure measurement?P-measurementForward pressure controlBack pressure control?P-control> Measuring principleThe Bronkhorst High-Tech EL-PRESS pressure sensor is a piezo-resistive bridge on the surface of a silicon chip. This chip is drilled out on its reverse side, giving the inside of the chip the form of a pressure diaphragm, whose thickness determines the pressure range. When a pressure acts on this chip, the diaphragm flexes, and the resistor values of the bridge alter in proportion to the pressure. The measuring cell is separated from the external pres-sure by a thin, sensitive stainless steel diaphragm, and the sealed off cavity between diaphragm and cell is filled with oil.Cross sectional drawing of a pressure sensor> Dimensional drawingsPressure MeterDimensions in mm.Forward Pressure ControllerDimensions in mm.Back Pressure ControllerDimensions in mm.1) with 1/4” face seal male connectionsP-506C Differential Pressure Transducer> ConfigurationsModel A B C H K Weight (kg)P-502C/P-512C/P-522C/P-532C 47 97 47 123 30 0,4P-502CM1) 87 124 47 128 29 0,6P-506C 55 105 47 116 30 0,4Model A B C H K Weight (kg)P-602CV/P-612CV 77 127 47 123 25 0,7P-602CM1) 87 124 47 128 29 0,7Model A B C H K Weight (kg)P-702CV/P-712CV 77 127 47 123 25 0,7P-702CM1) 87 124 47 128 29 0,7> Examples of some applicationsIt is of course impossible to picture the possible number of applications. Here is a limited quantity of basic examples, which are often seen with some variations. However, identical or similar configurations are used in totally different applications. Therefore please consider the ones pictured here as examples for solving common applications.> Pressure control combined with flow measurementThis arrangement of an EL-FLOW Mass Flow Meter with, in series, an EL-PRESS Forward Pressure Controller is used in burner test applications, or tests to check the inlet pressure dependence of the capacity of mechanical pressure regulators, or the tolerance on the bore of orifices, etc.> Forward Pressure Control in G.C. (gas chromatography)In Gas-Chromatography there is an increasing need to auto-mate all required parameters. The EL-PRESS Forward Pressure Controller enables the user to select a desired pressure profile for the analyses, whereby the pressure is kept constant to a very precise value, even at very low flow rates.> Pressure control with adjustable flowThe control valve of the EL-FLOW F-201CV Mass Flow Controller (MFC) forms a closed loop pressure control system with the EL-PRESS P-502C Pressure Transducer: the Mass Flow Meter of the MFC measures the required flow rate to maintain the set pres-sure level. The setpoint voltage divider enables the user to adjust the maximum flow to build up desired pressure levels. Restriction of the maximum flow may for safety reasons be important in cer-tain processes.> Back pressure control independent of gas mix and total flowA gas mixture is formed by EL-FLOW Mass Flow Controllers. In a process chamber the effect of the catalyst on certain reactions is tested. The pressure in the process chamber is controlled to the desired level by means of an EL-PRESS Back Pressure Controller, independent of the total flow and/or the composition of the mixture.> Compensation of atmospheric pressure changesSuperconducting coils, which are used to generate magnetic fields, are cooled by liquid helium. Depending on the temperature exchange gaseous helium should be vented. With a manually controlled outlet the variation of the atmospheric pressure disturbs the magnetic field. By using an EL-PRESS P-702CV Back Pressure Controller the pressure for the superconducting coils is kept constant, thus eliminating the negative effects of atmospheric pressure variations.P-502C Pressure Meter with F-004AC bellows valve for low ?P applicationsNijverheidsstraat 1a, NL-7261 AK Ruurlo The NetherlandsT +31(0)573 45 88 00 F +31(0)573 45 88 08 I www.bronkhorst.com E info@bronkhorst.comE.EPB.0111.K©BHT2011-012> Technical specificationsMeasurement / control system Accuracy : ±0,5% of full scale (FS)(incl. linearity and hysteresis)Pressure rangeability : Measurement: 1 : 50 (2 …100%) Control (with flow range 1 : 50) P-602CV/P-602CM/P-612CV 1 : 20 P-702CV/P-702CM/P-712CV 1 : 5Repeatability : = 0,1% RDResponse time sensor : 2 msecControl stability : = ±0,05% FS (typical for 1 ln/min N2 at specified process volume)Operating temperature : -10…+70°CTemperature sensitivity : 0,1% FS/°CLeak integrity : tested < 2 x 10-9 mbar l/s HeAttitude sensitivity : < 0,3 mbar (abs./rel. sensors); (at 90° change) < 6 mbar (dif. sensors)Warm-up time : negligibleMechanical parts Material (wetted parts) : stainless steel 316L or comparableSurface quality (wetted parts) : Ra = 0,8 µm typicalProcess connections : compression type or face seal couplingsSeals : standard: Viton options: EPDM, FFKM (Kalrez)Ingress protection (housing) : IP40Electrical properties Power supply : +15…24 VdcPower consumption : meter: max 115 mA; controller: max. 385 mA; add 50 mA for Profibus, if applicableAnalog output/command : 0…5 (10) Vdc, min. load impedance > 2 kOhm; 0 (4)…20 mA (sourcing output), max. load impedance < 375 OhmDigital communication Standard (9-pin D-conn. male) : RS232 By optional interface board : Profibus-DP®, DeviceNetTM, Modbus-RTU, FLOW-BUSElectrical connection Analog/RS232 : 9-pin D-connector (male); Profibus-DP® : bus: 9-pin D-connector (female); power: 9-pin D-connector (male); DeviceNetTM : 5-pin M12-connector (male); Modbus-RTU/FLOW-BUS : RJ45 modular jack CalibrationReferences verified by an ISO 17025 calibration laboratory, directly traceable to Dutch and international standards. Technical specifications and dimensions subject to change without notice. > Models and pressure rangesElectronic Pressure Transducers (EPT) Models, elast. sealed Pressure rangesP-502C (absolute/relative) min. 2…100 mbar max. 1,28…64 barP-512C (absolute/relative) max. 2…100 barP-522C (absolute/relative) max. 4…200 barP-532C (absolute/relative) max. 8…400 barP-506C (differential) min. 2…100 mbar max. 0,3…15 barModel, metal sealed Pressure rangesP-502CM (absolute/relative) min. 7…350 mbar max. 1,28…64 barElectronic Pressure Controllers (EPC)Models, elast. sealed Pressure ranges (abs/rel)P-602CV1) (forward pressure control) min. 5…100 mbar max. 3,2…64 barP-612CV1) (forward pressure control) max. 5…100 barP-702CV1) (back pressure control) min. 20…100 mbar max. 12,8…64 barP-712CV1) (back pressure control) max. 20…100 barModels, metal sealed Pressure ranges (abs/rel)P-602CM1) (forward pressure control) min. 17,5…350 mbar max. 3,2…64 barP-702CM1) (back pressure control) min. 70…350 mbar max. 12,8…64 bar1) Kv-max = 6,6 x 10-2 For ranges of 200 or 400 bar rated pressure controllers and for low-?P control applications with Kv-values up to 1.0 please contact factory.> Model number identification P-NNNAA - NNNA - A A A - NN - A Base model See above Sensor code Factory selected Communication (I/O) A RS232 + analog (n/c control) B RS232 + analog (n/o control) D RS232 + DeviceNetTM (n/c control) E RS232 + DeviceNetTM (n/o control) M RS232 + Modbus-RTU (n/c control) N RS232 + Modbus-RTU (n/o control) P RS232 + Profibus-DP® (n/c control) Q RS232 + Profibus-DP® (n/o control) R RS232 + FLOW-BUS (n/c control) S RS232 + FLOW-BUS (n/o control) Analog output A 0...5 Vdc B 0...10 Vdc F 0...20 mA sourcing G 4...20 mA sourcing Supply voltage D +15...24 Vdc Connections (in/out) 1 1/8“ OD compression type 2 1/4“ OD compression type 3 6 mm OD compression type 8 1/4” Face seal male Seals V Viton E EPDM K Kalrez (FFKM)