Teledyne CETAC Technologies

Direct Determination of Ultratrace Elements in Semiconductor Grade Hydrofluoric Acid HF (48%) using the Thermo Scientific iCAP Qs ICP-MS - Application Note

Semiconductor process chemicals with ultratrace metal content are required in order to minimize production losses due to reduced performance or defects. Hydrofluoric acid (HF), for example, is routinely used as a wet chemical etchant to remove silicon dioxide layers in semiconductor devices. Routine, automated quantification of ng·L-1 level ...