DSM XSA-0200C-S-0718-150-SS - Nanopositioning Piezoelectric

DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, inspection processes, and other precision applications. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position, stability, and control.