EBARA - Model 1400 - Wet Scrubbers- Brochure

With more than 1400 scrubbers in the field servicing Epitaxial, Metal Etch, Poly Etch and CVD process abatement applications, Airgard’s scrubbers are world renowned. Unrivalled in efficiency, the Airgard scrubber removes >99.99% of water-soluble gases by using a special combination of a specialized non-clogging gas inlet device, high flow spray chambers and a unique packed column design. Airgard’s scrubber is a great improvement over their competitors’ designs. It features specialized gas inlets that eliminates process tool downtime due to inlet restrictions. The Airgard scrubber increases productivity and yields, eliminating costly process tool downtime. Typically, the Airgard scrubber pays for itself within a year.